DATA COLLECTOR CONTROL SYSTEM WITH AUTOMATIC COMMUNICATION PORT SWITCH
First Claim
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1. A data collector control system placed between an equipment and an equipment automation programming (EAP) system, comprising:
- a data collector configured to manage and transmit communication messages between the equipment and the EAP system when the data collector operates normally; and
an automatic communication port switch control circuit configured to stop the transmission of the communication messages between the equipment and the EAP system through the data collector when the data collector operates abnormally, wherein the communication messages between the equipment and the EAP system are transmitted through the automatic communication port switch control circuit when the data collector operates abnormally.
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Abstract
A data collector control system for semiconductor manufacturing comprises a data collector and a automatic communication port switch control circuit. The control system is placed between an equipment and an equipment automation programming (EAP) system. The data collector processes and transmits communication messages between the equipment and the EAP system while the data collector operates normally. The communication messages between the equipment and the EAP system are transmitted through the control circuit instead of the data collector while the data collector operates abnormally.
5 Citations
15 Claims
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1. A data collector control system placed between an equipment and an equipment automation programming (EAP) system, comprising:
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a data collector configured to manage and transmit communication messages between the equipment and the EAP system when the data collector operates normally; and an automatic communication port switch control circuit configured to stop the transmission of the communication messages between the equipment and the EAP system through the data collector when the data collector operates abnormally, wherein the communication messages between the equipment and the EAP system are transmitted through the automatic communication port switch control circuit when the data collector operates abnormally. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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Specification