Graphical user interface for presenting multivariate fault contributions
First Claim
1. A method comprising:
- displaying in a current view of a user interface recipe steps of a manufacturing process run that generated a fault, the recipe steps being displayed in association with a first axis;
displaying in the current view at least one of measured parameters or calculated parameters of the manufacturing process run, at least one of the measured parameters and the calculated parameters being displayed in association with a second axis; and
displaying in the current view a plurality of intersections of the recipe steps with at least one of the measured parameters or the calculated parameters, each of the plurality of intersections including a representation of a fault contribution attributable to at least one of a distinct measured parameter or a distinct calculated parameter at a distinct recipe step.
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Abstract
Recipe steps of a manufacturing process run that generated a fault are displayed in a current view of a user interface, the recipe steps being displayed in association with a first axis. At least one of measured parameters or calculated parameters of the manufacturing process run are displayed in the current view, where at least one of the measured parameters and the calculated parameters are displayed in association with a second axis. A plurality of intersections of the recipe steps with at least one of the measured parameters or the calculated parameters are displayed in the current view, each of the plurality of intersections including a representation of a fault contribution attributable to at least one of a distinct measured parameter or a distinct calculated parameter at a distinct recipe step.
69 Citations
23 Claims
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1. A method comprising:
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displaying in a current view of a user interface recipe steps of a manufacturing process run that generated a fault, the recipe steps being displayed in association with a first axis; displaying in the current view at least one of measured parameters or calculated parameters of the manufacturing process run, at least one of the measured parameters and the calculated parameters being displayed in association with a second axis; and displaying in the current view a plurality of intersections of the recipe steps with at least one of the measured parameters or the calculated parameters, each of the plurality of intersections including a representation of a fault contribution attributable to at least one of a distinct measured parameter or a distinct calculated parameter at a distinct recipe step. - View Dependent Claims (2, 3, 4, 5)
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6. A computer readable medium including instructions that, when executed by a computer, cause the computer to perform a method comprising:
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displaying in a current view of a user interface recipe steps of a manufacturing process run that generated a fault, the recipe steps being displayed in association with a first axis; displaying in the current view at least one of measured parameters or calculated parameters of the manufacturing process run, at least one of the measured parameters and the calculated parameters being displayed in association with a second axis; and displaying in the current view a plurality of intersections of the recipe steps with at least one of the measured parameters or the calculated parameters, each of the plurality of intersections including a representation of a fault contribution attributable to at least one of a distinct measured parameter or a distinct calculated parameter at a distinct recipe step. - View Dependent Claims (7, 8, 9, 10)
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11. A user interface for a fault diagnosis system comprising:
a current view to display recipe steps of a manufacturing process run that generated a fault in association with a first axis, to display at least one of measured parameters or calculated parameters of the manufacturing process run in association with a second axis, and to display a plurality of intersections of the recipe steps with at least one of the measured parameters or the calculated parameters, each of the plurality of intersections including a representation of a fault contribution attributable to at least one of a distinct measured parameter or a distinct calculated parameter at a distinct recipe step. - View Dependent Claims (12, 13, 14, 15)
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16. A method comprising:
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displaying in a first view of a user interface a normalized trend plot of manufacturing process runs, wherein each of a plurality of data points in the trend plot represents normalized multivariate statistical data for a manufacturing process run; displaying in the first view a normalized threshold, wherein each of the plurality of data points that has a normalized value that exceeds the normalized threshold indicates a fault; receiving selection of a distinct data point having a distinct normalized value that exceeds the normalized threshold; displaying in a second view of the user interface recipe steps of a distinct manufacturing process run represented by the selected data point, the recipe steps being displayed in association with a first axis; displaying in the second view at least one of measured parameters or calculated parameters of the distinct manufacturing process run, at least one of the measured parameters and the calculated parameters being displayed in association with a second axis; and displaying in the second view a plurality of intersections of the recipe steps with at least one of the measured parameters or the calculated parameters, each of the plurality of intersections including a representation of a fault contribution attributable to at least one of a distinct measured parameter or a distinct calculated parameter at a distinct recipe step. - View Dependent Claims (17, 18, 19)
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20. A user interface for a fault diagnosis system comprising:
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a first view to display a normalized trend plot of manufacturing process runs, wherein each of a plurality of data points in the trend plot represents normalized multivariate statistical data for a manufacturing process run, and to display a normalized threshold, wherein each of the plurality of data points that has a normalized value that exceeds the normalized threshold indicates a fault; and a second view to display, upon a user selection of a distinct data point having a distinct normalized value that exceeds the normalized threshold, recipe steps of a distinct manufacturing process run represented by the selected data point in association with a first axis, to display in association with a second axis at least one of measured parameters or calculated parameters of the distinct manufacturing process run, and to display a plurality of intersections of the recipe steps with at least one of the measured parameters or the calculated parameters, each of the plurality of intersections including a representation of a fault contribution attributable to at least one of a distinct measured parameter or a distinct calculated parameter at a distinct recipe step. - View Dependent Claims (21, 22, 23)
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Specification