Rotation Speed Sensor
1 Assignment
0 Petitions
Accused Products
Abstract
Disclosed is a rotational rate sensor with a substrate, at least one basic element (1) which comprises a frame (2), a suspension (7) of the frame (2) on the substrate, at least one vibration facility (3) and a suspension (4, 5) of the vibration facility (3) on the frame (2), a drive device (8) and a reading facility (9, 10). The drive device (8) is designed in such a manner that it acts on the frame (2) of the basic element (1).
100 Citations
32 Claims
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1-16. -16. (canceled)
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17. A rotational rate sensor comprising:
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a substrate, at least one basic element (1, 11, 12, 13, 14) which comprises a frame (2) and a suspension (7) of the frame (2) on the substrate; at least one vibration facility (3) and a suspension (4, 5) of the vibration facility (3) on the frame (2); a drive means (8); and a reading facility (9, 10), wherein the drive means (8) is designed to act on the frame (2) of the basic element (1, 11, 12, 13, 14). - View Dependent Claims (18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32)
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Specification