SEMICONDUCTOR STRUCTURES
First Claim
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1. A semiconductor structure, comprising:
- a polycrystal substrate;
a first single crystal layer formed thereon; and
a second single crystal layer formed on the first single crystal layer.
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Abstract
A semiconductor structure is disclosed. The semiconductor structure includes a polycrystal substrate, a first single crystal layer formed thereon and a second single crystal layer formed on the first single crystal layer. A variation of coefficients of thermal expansion (CTE) between the first single crystal layer and the polycrystal substrate is less than 25%. There is no lattice mismatch between the first single crystal layer and the polycrystal substrate.
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11 Claims
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1. A semiconductor structure, comprising:
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a polycrystal substrate; a first single crystal layer formed thereon; and a second single crystal layer formed on the first single crystal layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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Specification