MICROELECTROMECHANICAL SYSTEM HAVING A DIELECTRIC MOVABLE MEMBRANE AND A MIRROR
First Claim
Patent Images
1. A microelectromechanical (MEMS) device comprising:
- at least one electrode;
a first reflective layer; and
a movable functional element comprising;
a flexible dielectric layer that flexes in response to voltages applied to the at least one electrode to move the functional element in a direction generally perpendicular to the first reflective layer; and
a reflective element having a first portion mechanically coupled to the flexible dielectric layer and a second portion spaced from the flexible dielectric layer and defining a gap therebetween.
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Abstract
A microelectromechanical (MEMS) device includes at least one electrode, a first reflective layer, and a movable functional element. The movable functional element includes a flexible dielectric layer and a reflective element. The flexible dielectric layer flexes in response to voltages applied to the at least one electrode to move the functional element in a direction generally perpendicular to the first reflective layer. The reflective element has a first portion mechanically coupled to the flexible dielectric layer and a second portion spaced from the flexible dielectric layer and defining a gap therebetween.
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Citations
43 Claims
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1. A microelectromechanical (MEMS) device comprising:
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at least one electrode; a first reflective layer; and a movable functional element comprising; a flexible dielectric layer that flexes in response to voltages applied to the at least one electrode to move the functional element in a direction generally perpendicular to the first reflective layer; and a reflective element having a first portion mechanically coupled to the flexible dielectric layer and a second portion spaced from the flexible dielectric layer and defining a gap therebetween. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A microelectromechanical (MEMS) device comprising:
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first means for reflecting; means for moving a portion of the device, the moving means comprising; second means for reflecting; and means for supporting the second reflecting means, a first portion of the supporting means mechanically coupled to the second reflecting means and a second portion of the supporting means spaced from the second reflecting means and defining a gap therebetween, the supporting means having a flexible dielectric portion; and means for actuating the moving means to move the second reflecting means in a direction generally perpendicular to the first reflecting means. - View Dependent Claims (18, 19, 20, 21, 22)
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23. A method of manufacturing a microelectromechanical (MEMS) device, the method comprising:
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providing a first reflective layer; forming a first sacrificial layer over the first reflective layer; forming a functional element over the first sacrificial layer, wherein forming the functional element comprises; forming a reflective element over the first sacrificial layer, the reflective element having a reflective surface substantially parallel to the first reflective layer; forming a second sacrificial layer over the reflective element; forming an aperture through the second sacrificial layer and over the reflective element; and forming a flexible dielectric layer over the second sacrificial layer, the flexible dielectric layer mechanically coupled to the reflective element through the aperture; and removing the first and second sacrificial layers such that the functional element is movable in a direction generally perpendicular to the first reflective layer. - View Dependent Claims (24, 25, 26, 27, 28, 29, 30)
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31. A microelectromechanical (MEMS) device comprising:
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at least one electrode; a first reflective layer; and a movable functional element comprising; a flexible layer that flexes in response to voltages applied to the at least one electrode to move the functional element in a direction generally perpendicular to the first reflective layer; and a reflective element having a first portion mechanically coupled to the flexible layer and a second portion spaced from the flexible layer and defining a gap therebetween, the reflective element comprising; a second reflective layer; an electrically conductive layer in electrical communication with the second reflective layer via a communication path; and a dielectric layer between the second reflective layer and the electrically conductive layer. - View Dependent Claims (32, 33, 34, 35, 36)
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37. A microelectromechanical (MEMS) device comprising:
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first means for reflecting; means for moving a portion of the device, the moving means comprising; second means for reflecting, the second reflecting means including a dielectric portion; and means for supporting the second reflecting means, a first portion of the supporting means mechanically coupled to the second reflecting means and a second portion of the supporting means spaced from the second reflecting means and defining a gap therebetween; and means for actuating the moving means to move the second reflecting means in a direction generally perpendicular to the first reflecting means. - View Dependent Claims (38, 39, 40, 41, 42, 43)
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Specification