Methods of using thin metal layers to make carbon nanotube films, layers, fabrics, ribbons, elements and articles

• US 20080280038A1
• Filed: 03/09/2007
• Published: 11/13/2008
• Est. Priority Date: 01/13/2003
• Status: Abandoned Application

• Current Assignee: Nantero Incorporated
• Original Assignee: Nantero Incorporated
• Inventors: Ward, Jonathan W., Segal, Brent M., Rueckes, Thomas
• Application Number:
  US11/716,448
• Publication Number:
  US 20080280038A1
• Time in Patent Office: Days
• US Class Current: 427/249.17
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: B82Y 30/00 Nanotechnology for materials or surface science, e.g. nanocomposites
• CPC Class Codes: B82Y 40/00 Manufacture or treatment of nanostructures
• CPC Class Codes: C01B 2202/02 Single-walled nanotubes
• CPC Class Codes: C01B 2202/22 Electronic properties
• CPC Class Codes: C01B 32/162 characterised by catalysts
• CPC Class Codes: D01F 9/1271 Alkanes or cycloalkanes
• CPC Class Codes: D01F 9/1272 Methane
• CPC Class Codes: G11C 2213/81 Array wherein the array conductors, e.g. word lines, bit lines, are made of nanowires

Abstract

Methods of using thin metal layers to make Carbon Nanotube Films, Layers, Fabrics, Ribbons, Elements and Articles are disclosed. Carbon nanotube growth catalyst is applied on to a surface of a substrate, including one or more thin layers of metal. The substrate is subjected to a chemical vapor deposition of a carbon-containing gas to grow a non-woven fabric of carbon nanotubes. Portions of the non-woven fabric are selectively removed according to a defined pattern to create the article. A non-woven fabric of carbon nanotubes may be made by applying carbon nanotube growth catalyst on to a surface of a wafer substrate to create a dispersed monolayer of catalyst. The substrate is subjected to a chemical vapor deposition of a carbon-containing gas to grow a non-woven fabric of carbon nanotubes in contact and covering the surface of the wafer and in which the fabric is substantially uniform density.

Claims

1. A method of making an article, comprising:

providing a substrate;

applying at least one layer of at least one metal catalyst on a surface of the substrate;

subjecting the substrate to a chemical vapor deposition of a carbon-containing gas to grow a non-woven fabric of carbon nanotubes; and

selectively removing portions of the non-woven fabric according to a defined pattern to create the article.

2. The method of claim 1, wherein applying the at least one layer of at least one metal catalyst comprises a physical vapor deposition technique.

3. The method of claim 1, wherein applying the at least one layer of at least one metal catalyst comprises applying at least one of iron, nickel, cobalt and molybdenum with a thickness of about 1-2 nm.

4. The method of claim 1, further comprising applying a co-catalyst.

5. The method of claim 4, wherein the co-catalyst comprises a metal layer comprising at least one of aluminum, molybdenum, and cobalt.

6. The method of claim 1, wherein applying the at least one layer of at least one metal catalyst to the substrate comprises applying an aluminum layer to the substrate, applying an iron layer to the aluminum layer, and applying a molybdenum layer to the iron layer.

7. The method of claim 6, wherein the aluminum, iron, and molybdenum are applied with a thickness ratio of 15:

1;

2.

8. The method of claim 6, wherein the aluminum, iron, and molybdenum are applied with respective thicknesses of 15 nm, 1 nm, and 2 nm.

9. The method of claim 1, further comprising applying at least one layer of at least one transitional metal catalyst comprising at least one yttrium, a lanthanide, and an actinide.

10. The method of claim 1, further comprising oxidizing the at least one layer of at least one metal catalyst.

11. The method of claim 1, wherein subjecting the substrate to chemical vapor deposition substantially vaporizes the at least one layer of at least one metal catalyst.

12. The method of claim 1, wherein the carbon-containing gas comprises methane.

13. The method of claim 1, wherein the carbon-containing gas comprises ethylene.

14. The method of claim 12, wherein the methane is applied at about a 100-750 sccm flow.

15. The method of claim 13, wherein the ethylene is applied at about a 1-5 sccm flow.

16. The method of claim 14, comprising performing the chemical vapor deposition at about 850°

C.

17. The method of claim 15, comprising performing the chemical vapor deposition at about 800°

C.

18. The method of claim 1, comprising performing the chemical vapor deposition for a run time of about 1-10 minutes.

19. The method of claim 1, wherein the substrate comprises a wafer substrate and wherein applying the at least one layer of at least one metal catalyst substantially covers the wafer substrate.

20. The method of claim 1, comprising applying the at least one layer of at least one metal catalyst according to a predefined pattern to cover only a portion of the substrate.

21. The method of claim 1, wherein the carbon containing gas is applied at a rate that is selected to provide the non-woven fabric with a pre-defined density and a pre-defined electrical resistance.

22. The method of claim 1, wherein the chemical vapor deposition is performed at a temperature that is selected to provide the non-woven fabric with a pre-defined density and a pre-defined electrical resistance.

23. The method of claim 5, wherein the co-catalyst is applied at a thickness that is selected to provide the non-woven fabric with a pre-defined density and a pre-defined electrical resistance.

24. The method of claim 1, wherein the carbon nanotubes of the non-woven fabric include metallic nanotubes and semiconducting nanotubes and wherein the relative composition of metallic and semiconducting nanotubes in the fabric is controlled.

25. The method of claim 1, wherein the carbon nanotubes of the non-woven fabric include metallic nanotubes and semiconducting nanotubes and wherein the method further includes selectively removing metallic nanotubes.

26. The method of claim 1, wherein the carbon nanotubes of the non-woven fabric include metallic nanotubes and semiconducting nanotubes and wherein the method further includes selectively removing semiconducting nanotubes.

27. The method of claim 24, wherein the relative composition of metallic and semiconducting nanotubes in the non-woven fabric is controlled during the chemical vapor deposition.

28. The method of claim 1, wherein subjecting the substrate to chemical vapor deposition includes exposing the substrate to inert gasses.

29. The method of claim 28 wherein the inert gasses comprise argon and hydrogen.

30. The method of claim 29 wherein the argon and hydrogen are flowed at a controlled rate of 1:

4.

31. The method of claim 1 further including applying a distribution of nanoparticles on the at least one layer of at least one metal catalyst, wherein the nanoparticles comprise carbon nanotube growth catalyst.