Fluid Storage and Dispensing System Including Dynamic Fluid Monitoring of Fluid Storage and Dispensing Vessel

• US 20080280380A1
• Filed: 10/24/2005
• Published: 11/13/2008
• Est. Priority Date: 10/25/2004
• Status: Active Grant

• Current Assignee: Entegris Incorporated
• Original Assignee: Advanced Technology Materials, Inc. (Entegris Incorporated)
• Inventors: Lurcott, Steven M., Kaim, Robert, Wodjenski, Michael J., Dietz, James, Bishop, Steven E., McManus, James V., Dimeo, Frank JR.
• Granted Patent: US 7,966,879 B2
• Time in Patent Office: Days
• US Class Current: 438/14
• CPC Class Codes: F17C 11/00 Use of gas-solvents or gas-sorbents in vessels absorbing compositions for acetylene C10L3/04; absorbing compositions for hydrogen C01B3/0005
• CPC Class Codes: G01F 15/063 using electrical means
• CPC Class Codes: G01F 22/02 involving measurement of pressure
• CPC Class Codes: G01F 23/804 containing circuits handling parameters other than liquid level
• CPC Class Codes: G01M 3/32 for containers, e.g. radiators
• CPC Class Codes: G01M 3/3236 by monitoring the interior space of the containers
• CPC Class Codes: G01N 33/00 Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
• CPC Class Codes: G06Q 10/087 Inventory or stock management, e.g. order filling, procurement or balancing against orders
• CPC Class Codes: G06Q 30/04 Billing or invoicing
• CPC Class Codes: G06Q 50/04 Manufacturing
• CPC Class Codes: H01L 21/561 Batch processing
• CPC Class Codes: H01L 21/568 Temporary substrate used as encapsulation process aid H01L21/4832 and H01L21/566 take precedence
• CPC Class Codes: H01L 21/6835 using temporarily an auxiliary support
• CPC Class Codes: H01L 22/10 Measuring as part of the manufacturing process burn-in G01R31/2855
• CPC Class Codes: H01L 2224/16225 the item being non-metallic, e.g. insulating substrate with or without metallisation
• CPC Class Codes: H01L 2224/16227 the bump connector connecting to a bond pad of the item
• CPC Class Codes: H01L 2224/24011 Deposited, e.g. MCM-D type
• CPC Class Codes: H01L 2224/2518 being disposed on at least two different sides of the body, e.g. dual array
• CPC Class Codes: H01L 2224/45099 Material
• CPC Class Codes: H01L 2224/48091 Arched
• CPC Class Codes: H01L 2224/48227 : connecting the wire to a bond pad of the item
• CPC Class Codes: H01L 23/5389 : the chips being integrally enclosed by the interconnect and support structures
• CPC Class Codes: H01L 24/24 : of an individual high density interconnect connector
• CPC Class Codes: H01L 24/48 : of an individual wire connector
• CPC Class Codes: H01L 24/82 : by forming build-up interconnects at chip-level, e.g. for high density interconnects [HDI] interconnection structure between a plurality of semiconductor chips H01L23/5389
• CPC Class Codes: H01L 25/03 : all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
• CPC Class Codes: H01L 25/0652 : the devices being arranged next and on each other, i.e. mixed assemblies
• CPC Class Codes: H01L 25/16 : the devices being of types provided for in two or more different main groups of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. forming hybrid circuits
• CPC Class Codes: H01L 2924/00014 : the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
• CPC Class Codes: H01L 2924/01005 : Boron [B]
• CPC Class Codes: H01L 2924/01006 : Carbon [C]
• CPC Class Codes: H01L 2924/01013 : Aluminum [Al]
• CPC Class Codes: H01L 2924/01023 : Vanadium [V]
• CPC Class Codes: H01L 2924/01027 : Cobalt [Co]
• CPC Class Codes: H01L 2924/01033 : Arsenic [As]
• CPC Class Codes: H01L 2924/01058 : Cerium [Ce]
• CPC Class Codes: H01L 2924/01076 : Osmium [Os]
• CPC Class Codes: H01L 2924/01078 : Platinum [Pt]
• CPC Class Codes: H01L 2924/01082 : Lead [Pb]
• CPC Class Codes: H01L 2924/014 : Solder alloys
• CPC Class Codes: H01L 2924/09701 : Low temperature co-fired ceramic [LTCC]
• CPC Class Codes: H01L 2924/14 : Integrated circuits
• CPC Class Codes: H01L 2924/19042 : being an inductor
• CPC Class Codes: H05K 1/185 : Components encapsulated in the insulating substrate of the printed circuit or incorporated in internal layers of a multilayer circuit semiconductor chips encapsulated by interconnect and support structures H01L23/5389, H01L24/00
• CPC Class Codes: H05K 2203/0165 : Holder for holding a Printed Circuit Board [PCB] during processing, e.g. during screen printing
• CPC Class Codes: H05K 2203/085 : Using vacuum or low pressure
• CPC Class Codes: H05K 2203/1469 : Circuit made after mounting or encapsulation of the components
• CPC Class Codes: H05K 3/4602 : characterized by a special circuit board as base or central core whereon additional circuit layers are built or additional circuit boards are laminated
• CPC Class Codes: Y02P 90/30 : Computing systems specially adapted for manufacturing
• CPC Class Codes: Y10T 29/4913 : Assembling to base an electrical component, e.g., capacitor, etc.
• CPC Class Codes: Y10T 29/49133 : with component orienting
• CPC Class Codes: Y10T 29/49165 : by forming conductive walled aperture in base
• CPC Class Codes: Y10T 29/53183 : Multilead component

Abstract

A monitoring system (100) for monitoring fluid in a fluid supply vessel (22, 24, 26, 28, 108) during operation including dispensing of fluid from the fluid supply vessel. The monitoring system includes (i) one or more sensors (114, 126) for monitoring a characteristic of the fluid supply vessel or the fluid dispensed therefrom, (ii) a data acquisition module (40, 132, 146) operatively coupled to the one or more sensors to receive monitoring data therefrom and responsively generate an output correlative to the characteristic monitored by the one or more sensors, and (iii) a processor (50, 150) and display (52, 150) operatively coupled with the data acquisition module and arranged to process the output from the data acquisition module and responsively output a graphical representation of fluid in the fluid supply vessel, billing documents, usage reports, and/or resupply requests.

Claims

1. A monitoring system for monitoring fluid in a fluid supply vessel during operation including dispensing of fluid from the fluid supply vessel, said monitoring system including (i) one or more sensors for monitoring a characteristic of the fluid supply vessel or the fluid dispensed therefrom, (ii) a data acquisition module operatively coupled to the one or more sensors to receive monitoring data therefrom and responsively generate an output correlative to the characteristic monitored by the one or more sensors, and (iii) a processor and display operatively coupled with the data acquisition module and arranged to process the output from the data acquisition module and responsively output a graphical representation of fluid in the fluid supply vessel.

2. The monitoring system of claim 1, wherein said one or more sensors monitor a characteristic of the fluid supply vessel.

3. The monitoring system of claim 2, wherein the characteristic of the fluid supply vessel is strain in a structural component of the vessel.

4. The monitoring system of claim 3, wherein the structural component of the vessel comprises a wall of the vessel.

5. The monitoring system of claim 3, wherein the one or more sensors comprise a strain gauge.

6. The monitoring system of claim 4, wherein the one or more sensors comprise a strain gauge secured in strain-sensing relationship to the vessel wall.

7. The monitoring system of claim 1, wherein said one or more sensors monitor a characteristic of fluid dispensed from the fluid supply vessel.

8. The monitoring system of claim 7, wherein said characteristic of fluid dispensed from the fluid supply vessel comprises at least one of fluid characteristics selected from the group consisting of fluid pressure, fluid temperature, concentration of one or more components of the fluid, flow rate of the fluid, pressure drop in flow circuitry coupled with the fluid supply vessel, and cumulative flow rate of the fluid dispensed from the fluid supply vessel.

9. The monitoring system of claim 7, wherein said characteristic of fluid dispensed from the fluid supply vessel comprises fluid pressure.

10. The monitoring system of claim 1, wherein the fluid supply vessel contains a sorbent medium having sorptive affinity for the fluid.

11. The monitoring system of claim 1, wherein the fluid supply vessel includes a pressure regulator interiorly disposed in the vessel and set to a set point for dispensing of fluid from the vessel.

12. The monitoring system of claim 11, wherein the set point of the pressure regulator is a subatmospheric pressure set point.

13. The monitoring system of claim 1, wherein the fluid supply vessel contains a semiconductor manufacturing fluid.

14. The monitoring system of claim 13, wherein the semiconductor manufacturing fluid comprises a fluid component selected from the group consisting of arsine, phosphine, boron trifluoride, germanium tetrafluoride, and silicon tetrafluoride.

15. The monitoring system of claim 1, wherein the graphical representation of fluid in the fluid supply vessel comprises a two-dimensional area with an upper boundary line, disposed in a rectangular field wherein the position of the upper boundary line of the two-dimensional area in the field indicates fluid inventory in the vessel.

16. The monitoring system of claim 1, wherein the graphical representation of fluid in the fluid supply vessel comprises a gas tank type gauge.

17. The monitoring system of claim 1, arranged to monitor fluid dispensing in an ion implanter installation.

18. The monitoring system of claim 1, further comprises a pressure reducing device that has a net effect in decreasing the interior pressure of a cylinder thereby reducing downstream pressure.

19. The monitoring system of claim 18, wherein the pressure-reducing device is a flow restrictive orifice.

20. A method of monitoring fluid in a fluid supply vessel during operation including dispensing of fluid from the fluid supply vessel, said method including (i) monitoring a characteristic of the fluid supply vessel or the fluid dispensed therefrom, (ii) acquiring data from said monitoring and responsively generating an output correlative to the monitoring characteristic, and (iii) processing the output from the data acquiring and responsively outputting a graphical representation of fluid in the fluid supply vessel.

21. The method of claim 20, wherein said characteristic comprises a characteristic of the fluid supply vessel.

22. The method of claim 20, wherein the characteristic comprises strain in a structural component of the vessel.

23. The method of claim 22, wherein the structural component of the vessel comprises a wall of the vessel.

24. The method of claim 22, wherein the monitoring comprises sensing strain by a strain gauge.

25. The method of claim 20, wherein said characteristic comprises a characteristic of fluid dispensed from the fluid supply vessel.

26. The method of claim 25, wherein said characteristic of fluid dispensed from the fluid supply vessel comprises at least one of fluid characteristics selected from the group consisting of fluid pressure, fluid temperature, concentration of one or more components of the fluid, flow rate of the fluid, pressure drop in flow circuitry coupled with the fluid supply vessel, and cumulative flow rate of the fluid dispensed from the fluid supply vessel.

27. The method of claim 25, wherein said characteristic of fluid dispensed from the fluid supply vessel comprises fluid pressure.

28. The method of claim 20, wherein the fluid supply vessel contains a sorbent medium having sorptive affinity for the fluid.

29. The method of claim 20, wherein the fluid supply vessel includes a pressure regulator interiorly disposed in the vessel and set to a set point for dispensing of fluid from the vessel.

30. The method of claim 29, wherein the set point of the pressure regulator is a subatmospheric pressure set point.

31. The method of claim 20, wherein the fluid supply vessel contains a semiconductor manufacturing fluid.

32. The method of claim 31, wherein the semiconductor manufacturing fluid comprises a fluid component selected from the group consisting of arsine, phosphine, boron trifluoride, germanium tetrafluoride, and silicon tetrafluoride.

33. The method of claim 20, wherein the graphical representation of fluid in the fluid supply vessel comprises a two-dimensional area with an upper boundary line, disposed in a rectangular field wherein the position of the upper boundary line of the two-dimensional area in the field indicates fluid inventory in the vessel.

34. The method of claim 20, wherein the graphical representation of fluid in the fluid supply vessel comprises a gas tank type gauge.

35. The method of claim 20, wherein the fluid supply vessel is arranged for dispensing of fluid to an ion implanter.

36. A monitoring system for monitoring fluid in a fluid supply vessel during operation including dispensing of fluid from the fluid supply vessel, said monitoring system including (i) one or more sensors for monitoring a characteristic of the fluid supply vessel or the fluid dispensed therefrom, (ii) a data acquisition apparatus operatively coupled to the one or more sensors to receive monitoring data therefrom and responsively generate an output correlative to the characteristic monitored by the one or more sensors, and (iii) a processor operatively coupled with the data acquisition apparatus and arranged to process the output from the data acquisition apparatus and responsively generate an output indicative of inventory of fluid in the fluid supply vessel.

37. The monitoring system of claim 36, wherein said one or more sensors comprise a pressure transducer adapted to monitor pressure of the fluid dispensed from the fluid supply vessel.

38. The monitoring system of claim 36, wherein said one or more sensors comprise a mass flow sensor adapted to monitor flow rate of the fluid dispensed from the fluid supply vessel.

39. The monitoring system of claim 36, wherein the dispensed fluid is utilized in a fluid-utilizing facility containing said fluid supply vessel, the one or more sensors, the data acquisition apparatus and the processor.

40. The monitoring system of claim 36, wherein the processor is located remotely from the fluid supply vessel, the one or more sensors, and the data acquisition apparatus.

41. The monitoring system of claim 36, wherein the dispensed fluid is utilized in a fluid-utilizing facility containing said fluid supply vessel and the one or more sensors, and the processor is in a fluid utilization billing facility remote from the fluid-utilizing facility.

42. The monitoring system of claim 41, comprising a first data acquisition module in the fluid-utilizing facility, and a second data acquisition module in the fluid utilization billing facility, operatively coupled to the processor and to the first data acquisition module.

43. The monitoring system of claim 41, wherein the processor is adapted to generate bills to the fluid-utilizing facility for dispensed fluid.

44. The monitoring system of claim 41, wherein the processor is adapted to generate reports of dispensed fluid.

45. The monitoring system of claim 41, wherein the data acquisition apparatus in the fluid-utilizing facility is coupled in signal transmission relationship with the processor in the fluid utilization billing facility by at least one communication modality selected from the group consisting of digital communications networks, signal transmission lines, and wireless communication modalities.

46. The monitoring system of claim 45, wherein the at least one communication modality includes an internet.

47. The monitoring system of claim 41, wherein the fluid-utilizing facility comprises a semiconductor manufacturing facility.

48. The monitoring system of claim 47, wherein the semiconductor manufacturing facility includes an ion implanter arranged in fluid supply relationship to the fluid supply vessel, and the fluid comprises a dopant source material for ion implantation.

49. The monitoring system of claim 36, wherein said output indicative of inventory of fluid in the fluid supply vessel includes a prompt or alert for change-out of the fluid supply vessel.

50. The monitoring system of claim 36, wherein said data acquisition apparatus is adapted for data logging of said characteristic.

51. The monitoring system of claim 48, wherein said one or more sensors comprise one or more pressure transducers producing analog electrical output and said analog electrical output is converted to light signals.

52. A monitoring system for monitoring material usage during operation including dispensing of material, said monitoring system including (i) one or more sensors for monitoring a characteristic of the dispensing, (ii) a data acquisition apparatus operatively coupled to the one or more sensors to receive monitoring data therefrom and responsively generate an output correlative to the characteristic monitored by the one or more sensors, and (iii) a processor operatively coupled with the data acquisition apparatus and arranged to process the output from the data acquisition apparatus and responsively generate an output indicative of inventory of material available for dispensing.

53. The monitoring system of claim 52, wherein said processor is at a billing location remote from said material usage location and said output includes a bill for material dispensed at said material usage location.

54. The monitoring system of claim 53, wherein the data acquisition apparatus includes a data acquisition module at said material usage location that is coupled in communication relationship with the remote billing location including a communication modality selected from the group consisting of digital information networks, wire communication, fiber optic communication, telemetry links and cellular communication.

55. The monitoring system of claim 54, wherein said communication modality includes an internet.

56. The monitoring system of claim 55, wherein said internet includes servers supporting information protocols affording communication via the World Wide Web.

57. The monitoring system of claim 53, adapted as a Web service system.

58. The monitoring system of claim 52, wherein said processor is in a portable digital device remote from said material usage location.

59. The monitoring system of claim 52, adapted to convert monitoring data from the one or more sensors to digital form.

60. The monitoring system of claim 52, adapted to monitor fluid usage of an ion implanter, with said processor being at a billing location remote from the ion implanter and said output of said processor including billing for said fluid usage.

61. The monitoring system of claim 52, wherein the output of the data acquisition apparatus comprises material inventory data of material available for dispensing, and the processor is adapted to utilize algorithms to convert the material inventory data into usage information, and algorithms to convert to the usage data into customer invoice and usage reports for said material.

68. The monitoring system of claim 52 in combination with a material supply system adapted to supply material for said dispensing.

69. The monitoring system of claim 68, wherein said material supply system includes filled vessels of said material at a supply location and transport vehicles for delivery of filled vessels of said material from said supply location to a use location for said dispensing.

70. A dispenser adapted to dispense material, operatively coupled with the monitoring system of claim 52.

71. A material utilizing apparatus adapted to receive material from a dispenser operatively coupled with the monitoring system of claim 52.

72. An article manufactured using dispensed material monitored during dispensing by the monitoring system of claim 52.

62. A semiconductor manufacturing facility, including:

an ion implanter including a gas box holding a dopant source fluid supply;

at least one sensor adapted to monitor at least one of temperature, pressure and flow rate of dopant source fluid dispensed from the dopant source fluid supply under dispensing conditions;

a data acquisition module installed in the gas box and adapted to receive monitoring signals from the sensor;

an output unit adapted to generate an output correlative to inventory of dopant source fluid in said dopant source fluid supply; and

a communication connection between the data acquisition module and the output unit.

63. The semiconductor manufacturing facility of claim 62, wherein the communication connection includes fiber optic communication line.

64. The semiconductor manufacturing facility of claim 62, wherein said dopant source fluid supply comprises multiple fluid supply vessels, and said at least one sensor comprises a pressure sensor for each of the multiple fluid supply vessels.

65. The semiconductor manufacturing facility of claim 62, wherein said data acquisition module accommodates data logging via a data communications interface of said module.

66. The semiconductor manufacturing facility of claim 62, wherein said data acquisition module provides external alerting capability through relay contacts.

67. A system for determining consumption of dopant source fluid in an ion implanter supplied with dopant source fluid from a dopant source fluid supply in a gasbox of the ion implanter, wherein said dopant source fluid supply includes a sorbent medium having sorptive affinity for the dopant source fluid, and from which adsorbed dopant source fluid is desorbed under dispensing conditions, said system comprising:

a temperature sensor adapted to sense gasbox temperature T;

a pressure monitor adapted for measuring the fluid storage and dispensing vessel pressure P;

said dopant source fluid supply comprising a dopant source fluid storage and dispensing vessel of a predetermined size containing a predetermined weight of said sorbent medium; and

a monitoring and control system operatively coupled to said temperature sensor and said pressure monitor, and adapted to conduct the steps of;

setting an end-point pressure for dispensing dopant source fluid from said dopant source fluid storage and dispensing vessel;

determining temperature coefficients dP/dT at various pressures;

determining temperature coefficient for said end-point pressure;

normalizing measured pressure from said pressure monitor to a predetermined temperature;

normalizing said end-point pressure to said predetermined temperature;

determining isotherm equations at said predetermined temperature for said sorbent medium and dopant source fluid; and

determining, using said isotherm equations, the amount of dopant source fluid remaining in the fluid storage and dispensing vessel.

73. A system for monitoring fluid inventory in a fluid storage and dispensing vessel containing a storage medium having sorptive affinity for the fluid, from which the fluid is dispensed under dispensing conditions for use in a fluid-utilizing process, said system comprising:

(a) a database of adsorption isotherm data for the fluid on the storage medium;

(b) a monitor adapted to monitor at least one fluid inventory-sensitive variable selected from the group consisting of characteristics of the fluid storage and dispensing vessel, dispensing conditions, characteristics of the dispensed fluid, and characteristics of the fluid-utilizing process, and to responsively generate a monitoring signal correlative to said at least one fluid inventory-sensitive variable; and

(c) a processor adapted to receive said monitoring signal and to responsively conduct a signal processing operation correlating said at least one fluid inventory-sensitive variable with information in said database of adsorption isotherm data to generate an output indicative of fluid inventory in said fluid storage and dispensing vessel.

74. The system of claim 73, wherein said at least one fluid inventory-sensitive variable includes at least one of dispensed fluid pressure and dispensed fluid flow rate.

75. A system for monitoring fluid inventory in a fluid storage and dispensing vessel containing a fluid that is dispensed under dispensing conditions for use in a fluid-utilizing process, said system comprising:

(a) a monitor adapted to monitor at least one fluid characteristic during dispensing of said fluid, and to responsively generate a monitoring signal correlative to said at least one fluid characteristic;

(b) a database of information relevant to determining inventory of fluid in said fluid storage and dispensing vessel during said dispensing; and

(c) a processor adapted to process said monitoring signal in a signal processing operation correlating said monitoring signal with information in said database to generate an output indicative of fluid inventory in said fluid storage and dispensing vessel.

76. The system of claim 75, wherein said at least one fluid characteristic includes at least one of dispensed fluid pressure and dispensed fluid flow rate.

77. A system for monitoring fluid inventory in a fluid storage and dispensing vessel containing a fluid that is dispensed under dispensing conditions for use in a fluid-utilizing process, said system comprising:

(a) a strain monitor adapted to monitor strain of said fluid storage and dispensing vessel during dispensing of said fluid, and to responsively generate a monitoring signal correlative to said strain;

(b) a database of information relevant to determining inventory of fluid in said fluid storage and dispensing vessel during said dispensing; and

(c) a processor adapted to process said monitoring signal in a signal processing operation correlating said monitoring signal with information in said database to generate an output indicative of fluid inventory in said fluid storage and dispensing vessel.

78. The system of claim 77, wherein information in said database includes information selected from the group consisting of compressibilities of the fluid under varied dispensing conditions, fluid storage and dispensing vessel characteristics, fluid molecular weight information, and PVT relationships applicable to the fluid.

79. A method of monitoring fluid in a fluid supply vessel during operation including dispensing of fluid from the fluid supply vessel, said method including (i) monitoring a characteristic of the fluid supply vessel or the fluid dispensed therefrom, (ii) acquiring data from said monitoring, and generating data acquisition signal(s) correlative to the characteristic, and (iii) processing the data acquisition signal(s) and responsively generating an output indicative of inventory of fluid in the fluid supply vessel.

80. The method of claim 79, wherein said monitoring comprises monitoring pressure of the fluid dispensed from the fluid supply vessel.

81. The method of claim 79, wherein said monitoring comprises monitoring flow rate of the fluid dispensed from the fluid supply vessel.

82. The method of claim 79, further comprising using the dispensed fluid in a fluid-utilizing facility.

83. The method of claim 79, wherein said processing is conducted remotely from a location of use of fluid dispensed in said dispensing.

84. The method of claim 79, wherein the fluid dispensed in said dispensing is utilized in a fluid-utilizing facility, and said processing is conducted in a fluid utilization billing facility remote from the fluid-utilizing facility.

85. The method of claim 84, comprising a first data acquisition module in the fluid-utilizing facility for said acquiring data, and a second data acquisition module in the fluid utilization billing facility, operatively coupled to a processor adapted for said processing and to the first data acquisition module.

86. The method of claim 84, wherein said processing generates bills to the fluid-utilizing facility for dispensed fluid.

87. The method of claim 84, wherein said processing generates reports of dispensed fluid.

88. The method of claim 84, wherein data from said acquiring in the fluid-utilizing facility is communicated to the fluid utilization billing facility by at least one communication modality selected from the group consisting of digital communications networks, signal transmission lines, and wireless communication modalities.

89. The method of claim 88, wherein the at least one communication modality includes an internet.

90. The method of claim 84, wherein the fluid-utilizing facility comprises a semiconductor manufacturing facility.

91. The method of claim 90, wherein the semiconductor manufacturing facility includes an ion implanter arranged in fluid supply relationship to the fluid supply vessel, and the fluid comprises a dopant source material for ion implantation.

92. The method of claim 79, wherein said output indicative of inventory of fluid in the fluid supply vessel includes a prompt or alert for change-out of the fluid supply vessel.

93. The method of claim 79, further comprising data logging of said characteristic.

94. The monitoring system of claim 79, wherein said data acquisition signal(s) comprise light signals.

95. A method of monitoring material usage during operation including dispensing of material, said monitoring method including (i) monitoring a characteristic of the dispensing, (ii) acquiring data from said monitoring, and generating data acquisition signal(s) correlative to the characteristic, and (iii) processing the data acquisition signal(s) and responsively generating an output indicative of inventory of material available for dispensing.

96. The method of claim 95, wherein processing is conducted at a billing location remote from a location of usage of said material and said output includes a bill for material dispensed at said location of usage of said material.

97. The method of claim 96, wherein said acquiring data includes use of a data acquisition module at said location of usage of said material that is coupled in communication relationship with the billing location by a communication modality selected from the group consisting of digital information networks, wire communication, fiber optic communication, telemetry links and cellular communication.

98. The method of claim 97, wherein said communication modality includes an internet.

99. The method of claim 98, wherein said internet includes servers supporting information protocols affording communication via the World Wide Web.

100. The method of claim 96, conducted as a Web service.

101. The method of claim 95, wherein said processing is conducted in a portable digital device remote from said location of usage of said material.

102. The method of claim 95, comprising converting data from said monitoring to digital form.

103. The method of claim 95, wherein said monitoring comprises monitoring fluid usage of an ion implanter, and said processing is conducted at a billing location remote from the ion implanter and said output includes billing for said fluid usage.

104. The method of claim 95, wherein the data from said monitoring comprises material inventory data of material available for dispensing, and said processing utilizes algorithms to convert the material inventory data into usage information, and algorithms to convert to the usage data into customer invoice and usage reports for said material.

111. The method of claim 95, conducted in combination with a material supply operation comprising supplying material for said dispensing.

112. The method of claim 111, wherein said material supply operation includes providing filled vessels of said material at a supply location and transporting filled vessels of said material from said supply location to a use location for said dispensing.

113. A method of manufacturing a product comprising carrying out a manufacturing process utilizing a dispensed material, said method comprising monitoring material usage of said dispensed material by a monitoring method according to claim 95.

105. A method of manufacturing semiconductor products in a semiconductor manufacturing facility, including an ion implanter including a gas box holding a dopant source fluid supply, said method comprising monitoring at least one of temperature, pressure and flow rate of dopant source fluid dispensed from the dopant source fluid supply under dispensing conditions;

acquiring data in the gas box from said monitoring;

transmitting the acquired data to an output unit adapted to generate an output correlative to inventory of dopant source fluid in said dopant source fluid supply; and

generating said output.

106. The method of claim 105, wherein said transmitting is conducted via a fiber optic communication line.

107. The method of claim 105, wherein said dopant source fluid supply comprises multiple fluid supply vessels, and said monitoring comprises monitoring of each of the multiple fluid supply vessels.

108. The method of claim 105, further comprising data logging of the data from said acquiring.

109. The method of claim 105, wherein said generating said output comprises alerting of said inventory of the dopant source fluid.

110. A method of determining consumption of dopant source fluid in an ion implanter supplied with dopant source fluid from a dopant source fluid supply in a gas box of the ion implanter, wherein said dopant source fluid supply includes a sorbent medium having sorptive affinity for the dopant source fluid, and from which adsorbed dopant source fluid is desorbed under dispensing conditions, and said dopant source fluid supply comprising a dopant source fluid storage and dispensing vessel of a predetermined size containing a predetermined weight of said sorbent medium, said method comprising:

sensing gas box temperature T;

measuring the fluid storage and dispensing vessel pressure P;

setting an end-point pressure for dispensing dopant source fluid from said dopant source fluid storage and dispensing vessel;

determining temperature coefficients dP/dT at various pressures;

determining temperature coefficient for said end-point pressure;

normalizing measured pressure from said pressure monitor to a predetermined temperature;

normalizing said end-point pressure to said predetermined temperature;

determining isotherm equations at said predetermined temperature for said sorbent medium and dopant source fluid; and

determining, using said isotherm equations, the amount of dopant source fluid remaining in the fluid storage and dispensing vessel.

114. A method of monitoring fluid inventory in a fluid storage and dispensing vessel containing a storage medium having sorptive affinity for the fluid, from which the fluid is dispensed under dispensing conditions for use in a fluid-utilizing process, said method comprising:

(a) providing a database of adsorption isotherm data for the fluid on the storage medium;

(b) monitoring at least one fluid inventory-sensitive variable selected from the group consisting of characteristics of the fluid storage and dispensing vessel, dispensing conditions, characteristics of the dispensed fluid, and characteristics of the fluid-utilizing process;

(c) generating a monitoring signal correlative to said at least one fluid inventory-sensitive variable;

(d) processing said monitoring signal in a signal processing operation correlating said at least one fluid inventory-sensitive variable with information in said database of adsorption isotherm data to generate an output indicative of fluid inventory in said fluid storage and dispensing vessel.

115. The method of claim 114, wherein said at least one fluid inventory-sensitive variable includes at least one of dispensed fluid pressure and dispensed fluid flow rate.

116. A method of monitoring fluid inventory in a fluid storage and dispensing vessel containing a fluid that is dispensed under dispensing conditions for use in a fluid-utilizing process, said method comprising:

(a) monitoring at least one fluid characteristic during dispensing of said fluid;

(b) generating a monitoring signal correlative to said at least one fluid characteristic;

(c) providing a database of information relevant to determining inventory of fluid in said fluid storage and dispensing vessel during said dispensing; and

(d) processing said monitoring signal in a signal processing operation correlating said monitoring signal with information in said database to generate an output indicative of fluid inventory in said fluid storage and dispensing vessel.

117. The method of claim 116, wherein said at least one fluid characteristic includes at least one of dispensed fluid pressure and dispensed fluid flow rate.

118. A method of monitoring fluid inventory in a fluid storage and dispensing vessel containing a fluid that is dispensed under dispensing conditions for use in a fluid-utilizing process, said method comprising:

(a) monitoring strain of said fluid storage and dispensing vessel during dispensing of said fluid;

(b) generating a monitoring signal correlative to said strain;

(c) providing a database of information relevant to determining inventory of fluid in said fluid storage and dispensing vessel during said dispensing; and

(d) processing said monitoring signal in a signal processing operation correlating said monitoring signal with information in said database to generate an output indicative of fluid inventory in said fluid storage and dispensing vessel.

119. The method of claim 118, wherein said database information includes information selected from the group consisting of compressibilities of the fluid under varied dispensing conditions, fluid storage and dispensing vessel characteristics, fluid molecular weight information, and PVT relationships applicable to the fluid.

120. A method of supplying material to a user at a use location from a remote supply location of said material, involving material dispensing by the user at said use location, said method comprising (i) monitoring a characteristic of the dispensing, (ii) acquiring data from said monitoring, and generating data acquisition signal(s) correlative to the characteristic, (iii) processing the data acquisition signal(s) and responsively generating an output indicative of inventory of material available for dispensing, wherein processing is conducted at a billing location remote from a location of usage of said material and said output includes a bill for material dispensed at said location of usage of said material, and (iv) dispatching material from the remote supply location to the use location in response to said output indicative of inventory of material available for dispensing at said use location.