Semiconductor yield management system and method
3 Assignments
0 Petitions
Accused Products
Abstract
A system and method for yield management are disclosed wherein a data set containing one or more prediction variable values and one or more response variable values is input into the system. The system can process the input data set to remove prediction variables with missing values and data sets with missing values based on a tiered splitting method to maximize usage of all valid data points. The processed data can then be used to generate a model that may be a decision tree. The system can accept user input to modify the generated model. Once the model is complete, one or more statistical analysis tools can be used to analyze the data and generate a list of the key yield factors for the particular data set.
20 Citations
43 Claims
-
1-12. -12. (canceled)
-
13. A yield management system, comprising:
-
means for processing an input data set comprising one or more prediction variables and one or more response variables containing data about a particular semiconductor process, the processing means comprising tool usage parameter means to identify from prediction variables in the input data set a number of times that each tool is used during the semiconductor fabrication process, the tool usage parameter means determining a number that equals the number of times that each tool is used in each case contained in the input data set for the semiconductor fabrication process under analysis and producing an additional variable for each case having a value equal to the number; and means for generating a model based on the processed data.
-
-
14-41. -41. (canceled)
-
42. A yield management method, comprising:
-
processing an input data set comprising one or more prediction variables and one or more response variables containing data about a particular semiconductor process, the processing comprising identifying from prediction variables in the input data set a number of times that each tool is used during the semiconductor fabrication process to determine a number that equals the number of times that each tool is used in each case contained in the input data set for the semiconductor fabrication process under analysis and producing an additional variable for each case having a value equal to the number; and generating a model based on the processed data.
-
-
43-58. -58. (canceled)
Specification