Gas processing apparatus, gas processing method and integrated valve unit for gas processing apparatus

• US 20080282977A1
• Filed: 04/18/2008
• Published: 11/20/2008
• Est. Priority Date: 08/24/1999
• Status: Active Grant

• Current Assignee: Hayashi Otsuki, Yutaka Miura
• Original Assignee: Hayashi Otsuki, Yutaka Miura
• Inventors: Miura, Yutaka, Otsuki, Hayashi
• Granted Patent: US 7,828,016 B2
• Time in Patent Office: Days
• US Class Current: 118/710
• CPC Class Codes: F16K 11/0856 having all the connecting conduits situated in more than one plane perpendicular to the axis of the plug
• CPC Class Codes: F17D 1/04 for distribution of gas
• CPC Class Codes: Y10T 137/87885 Sectional block structure

Abstract

A process gas line (255) for carrying WF₆ gas for nucleation, a process gas line (259) for carrying WF₆ gas for film deposition after nucleation are joined at a single joint (280) to a carrier gas line (256). A gas line (270) is connected to the joint (280) to carry a mixed gas of the carrier gas and WF₆ gas to a processing chamber defined by a processing vessel. Sections of the carrier gas line (256) and the gas line (270) extending on the opposite sides of the joint (280) extend along a straight line, and the process gas lines (255, 259) are perpendicular to the gas line (270).

Claims

1. A gas processing apparatus comprising:

a process vessel adapted to contain a substrate therein;

an integrated valve device providing at least one gas line each for supplying a gas into the processing vessel, the integrated valve device including a plurality of blocks each having a gas passageway formed therethrough, the plurality of blocks including at least one valve block each provided therein with a valve element to control flow of the gas passing through the gas passage in the valve block; and

and evacuating device for evacuating an interior of the processing vessel,

wherein the plurality of blocks include two adjacent blocks which are connected in such a manner that the gas passages of the adjacent blocks are connected to form a continuous gas passage, one of the two adjacent blocks has a recess and the other of the two adjacent blocks has a projection fitted into the recess, and the continuous gas passage passes through the projection, and

wherein a washer is sandwiched between the projection and the recess, and is crushed by a pressure due to a connecting force between the two adjacent blocks to form a metal seal between the projection and the recess.

2. The gas processing apparatus according to claim 1, wherein the plurality of blocks includes:

a first set of blocks connected in series and providing at least a part of a first process gas line, as said at least one gas line, connecting a first process gas source to the processing vessel to supply a first process gas into the processing vessel; and

a second set of blocks connected in series and providing, at least a part of a carrier gas line, as said at least one gas line, connecting a carrier gas source to the processing vessel to supply a carrier gas into the processing vessel.

3. The gas processing apparatus according to claim 2, wherein:

the first process gas line merges into the carrier gas line at a junction;

the first set of block contains a shutoff valve block, as said at least one valve block, which has a function of a shutoff valve;

the shutoff valve block is arranged in the first process gas line at a position upstream of the junction; and

wherein an axis of the carrier gas line extends straightly at least in an area from a position upstream of the junction to a position downstream of the first junction without having any curved or bent portion in the area and the first process gas line intersects the carrier gas line at an angle at the junction.

4. The gas processing apparatus according to claim 3, wherein the shutoff valve block comprises:

a valve block body provided with a valve bore and into which the gas passage opens;

a valve element movably fitted into the valve bore of the valve block body; and

an actuator that drives the valve element.

5. The gas processing apparatus according to claim 3, wherein the first set of the blocks includes a mass-flow controller block provided with a mass-flow controller and disposed upstream of the shutoff-valve block.

6. The gas processing apparatus according to claim 2, wherein the plurality of block includes:

a third set of blocks connected in series and providing at least a part of a second process gas line, as said at least one gas line, connecting a second process gas source to the processing vessel to supply a second process gas into the processing vessel.

7. The gas processing apparatus according to claim 2, wherein the plurality of blocks includes:

a fourth set of blocks connected in series and providing at least a part of a cleaning gas line, as said at least one gas line, connecting a cleaning gas source to the processing vessel to supply a cleaning gas into the processing vessel.