×

Gas processing apparatus, gas processing method and integrated valve unit for gas processing apparatus

  • US 20080282977A1
  • Filed: 04/18/2008
  • Published: 11/20/2008
  • Est. Priority Date: 08/24/1999
  • Status: Active Grant
First Claim
Patent Images

1. A gas processing apparatus comprising:

  • a process vessel adapted to contain a substrate therein;

    an integrated valve device providing at least one gas line each for supplying a gas into the processing vessel, the integrated valve device including a plurality of blocks each having a gas passageway formed therethrough, the plurality of blocks including at least one valve block each provided therein with a valve element to control flow of the gas passing through the gas passage in the valve block; and

    and evacuating device for evacuating an interior of the processing vessel,wherein the plurality of blocks include two adjacent blocks which are connected in such a manner that the gas passages of the adjacent blocks are connected to form a continuous gas passage, one of the two adjacent blocks has a recess and the other of the two adjacent blocks has a projection fitted into the recess, and the continuous gas passage passes through the projection, andwherein a washer is sandwiched between the projection and the recess, and is crushed by a pressure due to a connecting force between the two adjacent blocks to form a metal seal between the projection and the recess.

View all claims
  • 0 Assignments
Timeline View
Assignment View
    ×
    ×