Methods for manufacturing fluid-filled mems displays

• US 20080283175A1
• Filed: 10/19/2007
• Published: 11/20/2008
• Est. Priority Date: 05/18/2007
• Status: Active Grant

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: Pixtronix, Incorporated (Qualcomm, Inc.)
• Inventors: Hagood, Nesbitt W., Fijol, John J., Steyn, Jasper Lodewyk
• Granted Patent: US 9,176,318 B2
• Time in Patent Office: Days
• US Class Current: 156/145
• CPC Class Codes: G02B 26/0833 the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD G02B26/0825 takes precedence; micromechanical devices in general B81B

Abstract

This invention relates to methods of manufacturing fluid-filled MEMS displays, where the fluid is sealed in the display assembly and substantially surrounds the moving components of the display to reduce the effects of stiction and to improve the optical and electromechanical performance of the display.

Claims

1. A method for manufacturing a display assembly including first and second transparent substrates comprising:

providing an array of MEMS light modulators on the first transparent substrate;

positioning the second transparent substrate adjacent to the first substrate such that the first transparent substrate is separated from the second transparent substrate by a gap;

applying a seal material along at least a portion of a perimeter of the display assembly;

filling the display assembly with a fluid such that the fluid substantially surrounds the movable portions of the MEMS light modulators; and

curing the seal material subsequent to filling the display assembly with fluid.

2. The method of claim 1 wherein the fluid is a liquid.

3. The method of claim 1 wherein the fluid is a gas.

4. The method of claim 1 wherein the fluid is a lubricant.

5. The method of claim 1 wherein applying the seal material precedes filling the display.

6. The method of claim 1 further comprising aligning the first and second transparent substrates prior to curing the seal material.

7. The method of claim 2 wherein filling the display assembly with fluid comprises applying the liquid to one of the first and second transparent substrates prior to aligning the first and second transparent substrates.

8. The method of claim 1 wherein filling the display assembly with fluid comprises reducing the air pressure surrounding the display assembly to below atmospheric pressure.

9. The method of claim 1 further comprising, while fabricating the array of MEMS lights modulators, fabricating at least one additional array of MEMS light modulators on the first transparent substrate.

10. The method of claim 9 further comprising separating the array of MEMS light modulators from the at least one additional array of MEMS light modulators subsequent to applying the seal material.

11. The method of claim 1 further comprising fabricating spacers on at least one of the first and second transparent substrates to maintain a gap between the two substrates.

12. The method of claim 1 further comprising providing a conductive material which bridges the gap between the first and second transparent substrates.

13. A method for manufacturing a display assembly including first and second transparent substrates comprising:

providing an array of MEMS light modulators on the first transparent substrate;

positioning the second transparent substrate adjacent to the first substrate such that the first transparent substrate is separated from the second transparent substrate by a gap;

applying a seal material along at least a portion of a perimeter of the display assembly;

curing the seal material to couple the first and second transparent substrates; and

filling the display assembly with a fluid subsequent to curing the seal material such that the fluid substantially surrounds the movable portions of the MEMS light modulators.

14. The method of claim 13 wherein the fluid is a liquid.

15. The method of claim 13 wherein the fluid is a gas.

16. The method of claim 13 wherein the fluid is a lubricant.

17. The method of claim 13 further comprising aligning the first and second transparent substrates prior to curing the seal material.

18. The method of claim 13 further comprising, while fabricating the array of MEMS lights modulators, fabricating at least one additional array of MEMS light modulators on the first transparent substrate.

19. The method of claim 18 further comprising separating the array of MEMS light modulators from the at least one additional array of MEMS light modulators subsequent to applying the seal material.

20. The method of claim 13 further comprising fabricating spacers on at least one of the first and second transparent substrates to maintain a gap between the two substrates.

21. The method of claim 13 further comprising providing a conductive material which bridges the gap between the first and second transparent substrates.

22. The method of claim 13 wherein applying the seal material to the display assembly comprises leaving at least one filling hole unsealed.

23. The method of claim 13 wherein filling the display assembly comprises reducing the air pressure surrounding the display assembly to below atmospheric pressure.

24. The method of claim 22 further comprising sealing the at least one filling hole subsequent to filling the display assembly to contain the fluid in the display assembly.