ELECTROMECHANICAL ELEMENT, DRIVING METHOD OF THE ELECTROMECHANICAL ELEMENT AND ELECTRONIC EQUIPMENT PROVIDED WITH THE SAME

• US 20080283374A1
• Filed: 05/15/2008
• Published: 11/20/2008
• Est. Priority Date: 05/17/2007
• Status: Active Grant

• Current Assignee: Panasonic Corporation (Panasonic Holdings Corporation)
• Original Assignee: Matsushita Electric Industrial Company Limited (Panasonic Holdings Corporation)
• Inventors: Naito, Yasuyuki
• Granted Patent: US 8,217,738 B2
• Time in Patent Office: Days
• US Class Current: 200/181
• CPC Class Codes: H01H 1/06 characterised by the shape or structure of the contact-making surface, e.g. grooved
• CPC Class Codes: H01H 1/18 with subsequent sliding
• CPC Class Codes: H01H 59/0009 making use of micromechanics

Abstract

An electromechanical element includes a first electrode which is provided on a substrate, and a second electrode and a third electrode which are provided via a gap with respect to the first electrode. The first electrode contacts with the second electrode when an attracting force is applied between the first electrode and the third electrode. The first electrode has a bending portion.

Claims

1. An electromechanical element, comprising:

a first electrode which is provided on a substrate; and

a second electrode and a third electrode which are provided via a gap with respect to the first electrode,

wherein the first electrode contacts with the second electrode when an attracting force is applied between the first electrode and the third electrode; and

wherein the first electrode has a bending portion.

2. The electromechanical element according to claim 1, wherein the bending portion is provided at a leading end of the first electrode so as to come closer to the second electrode.

3. The electromechanical element according to claim 1, wherein the bending portion is provided in an intermediate part of the first electrode.

4. The electromechanical element according to claim 3, wherein the bending portion has a portion proximate to the third electrode.

5. The electromechanical element according to claim 1, wherein a contact point between the first electrode and the second electrode is displaced in a horizontal direction with respect to the substrate.

6. The electromechanical element according to claim 1, wherein the bending portion has a V shape protruding toward the third electrode.

7. The electromechanical element according to claim 1, wherein the bending portion is a notch formed on a surface of the first electrode facing to the third electrode.

8. The electromechanical element according to claim 1, wherein the first electrode has a plurality of the bending portions.

9. The electromechanical element according to claim 1, wherein the third electrode is disposed at a position opposite to the bending portion.

10. The electromechanical element according to claim 1, wherein a plurality of the third electrodes are provided.

11. The electromechanical element according to claim 10, wherein the third electrodes are disposed so as to sandwich a space opposite to the bending portion.

12. The electromechanical element according to claim 1, wherein the first electrode is expanded or contracted when the first electrode is separated from the second electrode.

18. An electronic equipment provided with the electromechanical element according to claim 1.

13. A driving method of an electromechanical element including a first electrode which has a bending portion and is provided on a substrate, and a second electrode and a third electrode which are provided via a gap with respect to the first electrode, the driving method comprising:

contacting the first electrode with the second electrode by applying an attracting force between the first electrode and the third electrode; and

releasing a contact state of the first electrode with the second electrode by an expanding or contracting force of the bending portion of the first electrode.

14. The driving method according to claim 13, wherein in the contacting process, the first electrode is displaced on the second electrode at a contact position between the first electrode and the second electrode by an expanding or contracting force of the bending portion.

15. The driving method according to claim 13, wherein the releasing process, the first electrode is displaced on the second electrode at a contact position between the first electrode and the second electrode by an expanding or contracting force of the bending portion.

16. The driving method according to claim 13, wherein in the releasing process, an attracting force is instantaneously applied between the first electrode and the third electrode before the contact state of the first electrode with the second electrode is released.

17. The driving method according to claim 13, wherein in the releasing process, the contact state of the first electrode with the second electrode is released by a restoring force of the bending portion.