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Electronic Device Comprising a Mems Element

  • US 20080283943A1
  • Filed: 11/07/2006
  • Published: 11/20/2008
  • Est. Priority Date: 11/17/2005
  • Status: Abandoned Application
First Claim
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1. A method of manufacturing an electronic device that comprises a microelectromechanical (MEMS) element, which is provided with a fixed electrode and a movable electrode that is defined in a cavity and is movable towards and from the fixed electrode between a first gapped position and a second position, said method comprising:

  • providing a substrate with a first and an opposite second side and with a sacrificial portion, the substrate including the electrodes of the MEMS element;

    providing contact pads on the first side of the substrate;

    applying a temporary carrier on the contact pads;

    providing at least one etching hole in the substrate from the second side to give access to the cavity;

    removing the sacrificial portion of the substrate through the at least one etching hole;

    closing the at least one etching hole; and

    removing the temporary carrier,whereinthe contact pads are provided on a flexible resin layer that is present on the electrodes of the MEMS element, wherein electrical connections extend through the resin layer to at least one element in the device; and

    the substrate is provided with a packaging portion on the second side of the substrate through which the etching holes extend, while the sacrificial portion is at least partially present between the movable electrode and the packaging portion.

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