Electronic Device Comprising a Mems Element
First Claim
1. A method of manufacturing an electronic device that comprises a microelectromechanical (MEMS) element, which is provided with a fixed electrode and a movable electrode that is defined in a cavity and is movable towards and from the fixed electrode between a first gapped position and a second position, said method comprising:
- providing a substrate with a first and an opposite second side and with a sacrificial portion, the substrate including the electrodes of the MEMS element;
providing contact pads on the first side of the substrate;
applying a temporary carrier on the contact pads;
providing at least one etching hole in the substrate from the second side to give access to the cavity;
removing the sacrificial portion of the substrate through the at least one etching hole;
closing the at least one etching hole; and
removing the temporary carrier,whereinthe contact pads are provided on a flexible resin layer that is present on the electrodes of the MEMS element, wherein electrical connections extend through the resin layer to at least one element in the device; and
the substrate is provided with a packaging portion on the second side of the substrate through which the etching holes extend, while the sacrificial portion is at least partially present between the movable electrode and the packaging portion.
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Accused Products
Abstract
The device (100) comprises a MEMS element (60) in a cavity (30) that is closed by a packaging portion (17) on a second side (2) of the substrate (10). Contact pads (25) are defined on a flexible resin layer (13) on an opposite first side (1) of the substrate. Electrical connections (32) extend through the resin layer (13) to at least one element of the device (100). The device (100) is suitably made with the use of a temporary carrier (42), and opening of etching holes (18) from the second side (2) of the substrate (10).
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Citations
13 Claims
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1. A method of manufacturing an electronic device that comprises a microelectromechanical (MEMS) element, which is provided with a fixed electrode and a movable electrode that is defined in a cavity and is movable towards and from the fixed electrode between a first gapped position and a second position, said method comprising:
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providing a substrate with a first and an opposite second side and with a sacrificial portion, the substrate including the electrodes of the MEMS element; providing contact pads on the first side of the substrate; applying a temporary carrier on the contact pads; providing at least one etching hole in the substrate from the second side to give access to the cavity; removing the sacrificial portion of the substrate through the at least one etching hole; closing the at least one etching hole; and removing the temporary carrier, wherein the contact pads are provided on a flexible resin layer that is present on the electrodes of the MEMS element, wherein electrical connections extend through the resin layer to at least one element in the device; and the substrate is provided with a packaging portion on the second side of the substrate through which the etching holes extend, while the sacrificial portion is at least partially present between the movable electrode and the packaging portion. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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- 9. An electronic device comprising a substrate of a semiconductor material with a first and an opposite second side and a microelectromechanical (MEMS) element which is provided with a fixed and a movable electrode, which is defined in a closed cavity and is movable towards and from the fixed electrode between a first gapped position and a second position, the cavity being opened through holes in the substrate that are exposed on the second side of the substrate, said electrodes being coupled to contact pads on the first side, wherein a resin layer is present between the electrodes of the MEMS element and the contact pads, wherein the substrate is provided with a packaging portion on the second side of the substrate through which the etching holes extend, wherein the cavity is at least partially present between the movable electrode and the packaging portion.
Specification