Housed active microstructures with direct contacting to a substrate
First Claim
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1. A microstructured component with microsensors or other active microcomponents, comprising:
- a substrate, which is provided with electrical conductor tracks, and at least one housing arranged on the substrate with one or more active microstructures situated in the substrate, at least one of the active microstructures being contacted through the enclosing housing electrically with an electrical conductor track of the substrate, and a semiconductor circuit.
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Abstract
A microstructured component with microsensors or other active mircrocomponent is provided. The microstructured component includes a substrate and at least one housing arranged on the substrate with one or more active microstructures situated on it.
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Citations
31 Claims
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1. A microstructured component with microsensors or other active microcomponents, comprising:
- a substrate, which is provided with electrical conductor tracks, and at least one housing arranged on the substrate with one or more active microstructures situated in the substrate, at least one of the active microstructures being contacted through the enclosing housing electrically with an electrical conductor track of the substrate, and a semiconductor circuit.
- View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31)
Specification