Monolithic, Non-Contact Six Degree-of-Freedom Stage Apparatus

• US 20080285004A1
• Filed: 05/18/2007
• Published: 11/20/2008
• Est. Priority Date: 05/18/2007
• Status: Abandoned Application

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Watson, Douglas C., Arai, Yoichi, Phillips, Alton H., Binnard, Michael B.
• Application Number:
  US11/750,545
• Publication Number:
  US 20080285004A1
• Time in Patent Office: Days
• US Class Current: 355/72
• CPC Class Codes: G03F 7/70725 control
• CPC Class Codes: G03F 7/70758 Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving
• CPC Class Codes: G03F 7/70766 Reaction force control means, e.g. countermass
• CPC Class Codes: G03F 7/70816 Bearings
• CPC Class Codes: G03F 7/709 Vibration, e.g. vibration detection, compensation, suppression or isolation

Abstract

Methods and apparatus for controlling a stage assembly in up to six degrees of freedom using actuators which each allow for forces to be generated in a horizontal direction and a vertical direction are disclosed. According to one aspect of the present invention, a stage apparatus includes a stage assembly and a first stator arrangement. The stage assembly includes a first magnet arrangement of an actuator assembly, and the first stator arrangement is part of the actuator assembly. The first magnet arrangement cooperates with the first stator arrangement to allow the stage assembly to move relative to a first horizontal axis as well as a vertical axis.

Claims

1. A stage apparatus comprising:

a stage assembly, the stage assembly including a first magnet arrangement; and

a countermass, the countermass being arranged to include a first stator arrangement, wherein the first stator arrangement is arranged to cooperate with the first magnet arrangement to allow the stage assembly to move relative to a first horizontal axis and a vertical axis, and wherein the countermass is arranged to absorb reaction forces associated with the stage assembly.

2. The stage apparatus of claim 1 further including:

a countermass, the countermass being arranged to include the first stator arrangement, wherein the countermass is arranged to absorb reaction forces associated with the stage assembly

3. The stage apparatus of claim 1 wherein the first stator arrangement includes a coil assembly, the coil assembly being arranged to cooperate with the first magnet arrangement, the coil assembly including a top half and a bottom half, the top half and the bottom half being arranged to be substantially independently controlled such that a multiphase first current applied to the top half may be applied substantially independently from a multiphase second current applied to the bottom half.

4. The stage apparatus of claim 3 wherein the multiphase first current and the multiphase second current interact with the first magnet arrangement to independently control a net force applied to the stage assembly along the first horizontal axis and a net force applied to the stage assembly along the vertical axis.

5. The stage apparatus of claim 1 wherein the stage assembly further includes a second magnet arrangement and the stage apparatus further includes a second stator arrangement, wherein the second magnet arrangement and the second stator arrangement are arranged to cooperate to allow the stage assembly to be controlled relative to a second horizontal axis, the second horizontal axis being substantially perpendicular to the first horizontal axis.

6. The stage apparatus of claim 5 wherein the stage assembly is arranged to rotate relative to the first horizontal axis, the second horizontal axis, and the vertical axis.

7. The stage apparatus of claim 1 wherein the first magnet arrangement and the first stator arrangement are arranged to cooperate to allow the stage assembly to rotate.

8. The stage apparatus of claim 1 wherein the stage assembly is a monolithic stage assembly.

9. The stage apparatus of claim 1 wherein the stage assembly is a non-contact stage.

10. The stage apparatus of claim 1 further including:

a base arrangement; and

an anti-gravity device, the anti-gravity device being arranged to support a weight of the stage assembly relative to the vertical axis, wherein the anti-gravity device is positioned substantially over the base arrangement.

11. The stage apparatus of claim 10 wherein the anti-gravity device includes a carrier stage arrangement and a piston arrangement, the carrier stage arrangement being arranged to translate over the base arrangement on a first air bearing, the piston arrangement being arranged to apply a force that supports the stage assembly on a second air bearing.

12. The stage apparatus of claim 10 wherein the anti-gravity device includes an air bearing arrangement and a soft spring arrangement, the soft spring arrangement being substantially positioned between the stage assembly and the air bearing arrangement.

13. The stage apparatus of claim 12 wherein the soft spring arrangement is one selected from the group including a flexure, a mechanical spring, an air bellows, and an air piston.

14. The stage apparatus of claim 10 wherein the anti-gravity device includes a carrier stage arrangement and a bellows arrangement.

15. The stage apparatus of claim 12 wherein the carrier stage arrangement includes first and second stage components, the first stage component being arranged to translate over the base arrangement on a first air bearing and the second stage component being arranged to translate over the base arrangement on a second air bearing, the anti-gravity device including a first soft spring supported on the first stage component and arranged to apply a first force that supports the stage assembly, the anti-gravity device further including a second soft spring supported on the second stage component and arranged to apply a second force that supports the stage assembly.

16. The stage apparatus of claim 1 wherein the stage assembly includes a first stage and a second stage, the stage apparatus further including:

a base arrangement;

a first antigravity device, the first anti-gravity device being arranged to support a weight of the first stage relative to the vertical axis, wherein the first anti-gravity device is positioned substantially over the base arrangement; and

a second antigravity device, the second antigravity device being arranged to support a weight of the second stage relative to the vertical axis, wherein the second anti-gravity device is positioned substantially over the base arrangement.

17. The stage apparatus of claim 1 wherein the stage assembly is arranged to support a plurality of reticles.

18. The stage apparatus of claim 1 wherein the first magnet arrangement and the first stator arrangement are associated with a plurality of linear motors, the plurality of linear motors each being arranged to cause the stage assembly to move relative to the first horizontal axis and the vertical axis.

19. The stage apparatus of claim 1 wherein the stage apparatus is part of an illumination system of an exposure apparatus.

20. A device manufactured with the exposure apparatus of claim 19.

21. A wafer on which an image has been formed by the exposure apparatus of claim 19.

23. The method of claim 21 wherein the first stator arrangement and the second stator arrangement are part of a counter mass arrangement, the countermass arrangement including a frame, the frame being arranged to define a space, the space encompassing an operating area of the stage.

24. The method of claim 21 wherein the first stator arrangement includes a coil assembly having a first coil and a second coil, and applying the at least one current to the first stator arrangement includes applying a multiphase first current to the first coil and applying a multiphase second current to the second coil, the second current being applied substantially independently from the first current, wherein applying the first current and the second current causes a substantially non-zero net force to be generated.

22. A method for controlling a stage, the stage being a part of a stage apparatus that also includes a first actuator arrangement, and a second actuator arrangement, the first actuator arrangement including a first magnet arrangement coupled to the stage and a first stator arrangement, the first actuator arrangement being arranged to cause the stage to move in a first horizontal direction and a vertical direction, the second actuator arrangement including a second magnet arrangement coupled to the stage and a second stator arrangement, the second actuator arrangement being arranged to control motion of the stage to move in a second horizontal direction, the method comprising:

applying at least one current to the first stator arrangement, wherein applying the at least one current to the first stator arrangement produces force on the stage in at least one of the first horizontal direction and the vertical direction; and

actuating the second actuator arrangement, wherein actuating the second actuator arrangement produces force on the stage in the second horizontal direction.

25. The method of claim 22 wherein the first actuator arrangement includes at least three linear motors, each linear motor of the at least three linear motors being arranged at corners of the stage, each linear motor of the at least three linear motors further being arranged to produce a force in the first horizontal direction and the vertical direction using magnets of the first magnet arrangement and stators of the first stator arrangement.

26. The method of claim 22 wherein the first actuator arrangement includes four pairs of linear motors, each pair of linear motors of the pairs of linear motors being arranged at corners of the stage, each pair of linear motors of the four pairs of linear motors further being arranged to produce a force in the first horizontal direction and a force in the vertical direction using magnets of the first magnet arrangement and stators of the first stator arrangement.

27. The method of claim 22 wherein the stage is a monolithic reticle stage, and wherein the first actuator arrangement and the second actuator arrangement are arranged to cooperate to enable the stage to move in up to six degrees of freedom.

28. The method of claim 22 wherein the stage is arranged to support a plurality of reticles.

29. A stage apparatus comprising:

a stage assembly, the stage assembly including a first magnet arrangement and a second magnet arrangement; and

a first stator arrangement and a second stator arrangement, wherein the first stator arrangement is arranged to cooperate with the first magnet arrangement to allow the stage assembly to control force relative to a first horizontal axis and the second stator arrangement is arranged to cooperate with the second magnet arrangement to allow the stage assembly to control force relative to a vertical axis.

30. The stage apparatus of claim 29 further including:

a countermass, the countermass being arranged to include the first stator arrangement and the second stator arrangement, wherein the countermass is arranged to absorb reaction forces associated with the stage assembly

31. The stage apparatus of claim 30 wherein the stage assembly further includes a third magnet arrangement arranged to cooperate with the countermass to allow the stage assembly to control force relative to a second horizontal axis, the second horizontal axis being substantially perpendicular to the first horizontal axis.

32. The stage apparatus of claim 31 wherein the third magnet arrangement is arranged to cooperate with the countermass to form at least one three-phase linear motor.

33. The stage apparatus of claim 31 wherein the stage assembly is arranged to rotate relative to the first horizontal axis, the second horizontal axis, and the vertical axis.

34. The stage apparatus of claim 29 wherein the first magnet arrangement and the first stator arrangement are arranged as at least one voice coil motor, and wherein the second magnet arrangement and the second stator arrangement are arranged as at least three voice coil motors.

35. The stage apparatus of claim 29 wherein the first magnet arrangement and the second magnet arrangement are each arranged in an approximately U-shaped orientation.

36. The stage apparatus of claim 29 wherein the stage assembly is a monolithic stage assembly.

37. The stage apparatus of claim 29 further including:

a base arrangement; and

an anti-gravity device, the anti-gravity device being arranged to support a weight of the stage assembly relative to the vertical axis, wherein the anti-gravity device is positioned substantially over the base arrangement.

38. The stage apparatus of claim 30 wherein the stage assembly is arranged to support a plurality of reticles.

39. The stage apparatus of claim 30 wherein the stage apparatus is part of an illumination system of an exposure apparatus.

40. A device manufactured with the exposure apparatus of claim 39.

41. A wafer on which an image has been formed by the exposure apparatus of claim 39.

42. The stage apparatus of claim 29 wherein the stage assembly is a non-contact stage.