SYSTEM AND METHOD FOR MEASURING AND MAPPING A SIDEFORCE FOR A MOVER
First Claim
1. A mover for moving a stage along a first axis, the mover comprising:
- a magnetic component including a magnet that is surrounded by a magnetic field;
a conductor component that is positioned near the magnetic component, the conductor component interacting with the magnetic component to generate a force when current is directed to the conductor component; and
a sensor for determining a first axis component of a magnetic flux of the magnetic component.
1 Assignment
0 Petitions
Accused Products
Abstract
A mover (344) that moves a stage (238) along a first axis includes a magnetic component (354), a conductor component (356), and a sensor (366). The magnetic component (354) includes one or more magnets (354D) that are surrounded by a magnetic field. The conductor component (356) is positioned near the magnetic component (354). Further, the conductor component (356) interacts with the magnetic component (354) to generate a force when current is directed to the conductor component (356). The sensor (366) can be used for determining a first axis component of a magnetic flux of the magnetic component (354) during operation of the mover (344). Further, the sensor (366) can be used to determine a side force (365) that along a second axis that is orthogonal to the first axis that is being generated by the mover (344). With this design, the mover (344) or other components can be controlled to compensate for the side force (370).
-
Citations
33 Claims
-
1. A mover for moving a stage along a first axis, the mover comprising:
-
a magnetic component including a magnet that is surrounded by a magnetic field; a conductor component that is positioned near the magnetic component, the conductor component interacting with the magnetic component to generate a force when current is directed to the conductor component; and a sensor for determining a first axis component of a magnetic flux of the magnetic component. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
-
-
16. A mover for moving a stage along a first axis, the mover comprising:
-
a magnetic component including a magnet that is surrounded by a magnetic field, the magnetic component defining a magnetic gap; a conductor component that is positioned in the magnetic gap, the conductor component interacting with the magnetic component to generate a force when current is directed to the conductor component; and a sensor for determining a side force along a second axis that is orthogonal to the first axis that is generated by the mover, the sensor being positioned in the magnetic gap. - View Dependent Claims (17, 18, 19, 20, 21, 22, 23, 24, 25)
-
-
26. A method for moving a device along a first axis, the method comprising the steps of:
-
coupling the device to a stage; coupling a mover the stage, the mover including a magnetic component having a plurality of magnets that are surrounded by a magnetic field, and a conductor component that is positioned neat the magnetic component, the conductor component interacting with the magnetic component to generate a force when current is directed to the conductor component; and determining a first axis component of a magnetic flux of the magnetic component with a sensor. - View Dependent Claims (27, 28, 29, 30, 31, 32, 33)
-
Specification