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SYSTEM AND METHOD FOR MEASURING AND MAPPING A SIDEFORCE FOR A MOVER

  • US 20080285005A1
  • Filed: 04/23/2008
  • Published: 11/20/2008
  • Est. Priority Date: 05/15/2007
  • Status: Abandoned Application
First Claim
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1. A mover for moving a stage along a first axis, the mover comprising:

  • a magnetic component including a magnet that is surrounded by a magnetic field;

    a conductor component that is positioned near the magnetic component, the conductor component interacting with the magnetic component to generate a force when current is directed to the conductor component; and

    a sensor for determining a first axis component of a magnetic flux of the magnetic component.

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