OPTICAL CHARACTERISTIC MEASURING APPARATUS AND MEASURING METHOD USING LIGHT REFLECTED FROM OBJECT TO BE MEASURED
First Claim
1. An optical characteristic measuring apparatus comprising:
- a measurement-purpose light source generating a measurement light including a component in a wavelength range for measurement of an object to be measured;
an observation-purpose light source generating an observation light including a component that can be reflected from said object;
a condensing optical system to which said measurement light and said observation light are applied and which condenses the applied light;
a light injecting portion, at a predetermined position on an optical path from said measurement-purpose light source to said condensing optical system, injecting said observation light;
a light separating portion separating a reflected light generated at said object into a measurement reflected light and an observation reflected light;
an output portion outputting at least one of a reflected image obtained from said observation reflected light and a signal according to the reflected image; and
an adjusting mechanism capable of changing a positional relation between said condensing optical system and said object.
1 Assignment
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Accused Products
Abstract
A measurement-purpose light source generates a measurement light used for measuring an optical characteristic of an object to be measured, and the measurement light includes a component in a wavelength range for measurement of the optical characteristic of the object. An observation-purpose light source generates an observation light used for focusing on the object to be measured and checking a position of measurement. The observation light is selected such that the observation light includes a component that can be reflected from the object to be measured. The measurement light and the observation light are thus applied independently to the object to be measured, through a common objective lens, and accordingly improvement of the precision in measurement of the optical characteristic and facilitation of focusing on the object to be measured are achieved simultaneously.
16 Citations
9 Claims
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1. An optical characteristic measuring apparatus comprising:
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a measurement-purpose light source generating a measurement light including a component in a wavelength range for measurement of an object to be measured; an observation-purpose light source generating an observation light including a component that can be reflected from said object; a condensing optical system to which said measurement light and said observation light are applied and which condenses the applied light; a light injecting portion, at a predetermined position on an optical path from said measurement-purpose light source to said condensing optical system, injecting said observation light; a light separating portion separating a reflected light generated at said object into a measurement reflected light and an observation reflected light; an output portion outputting at least one of a reflected image obtained from said observation reflected light and a signal according to the reflected image; and an adjusting mechanism capable of changing a positional relation between said condensing optical system and said object. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A method of measuring an optical characteristic of an object to be measured, using an optical characteristic measuring apparatus,
said optical characteristic measuring apparatus including: -
a measurement-purpose light source generating a measurement light including a component in a wavelength range for measurement of said object; an observation-purpose light source generating an observation light including a component that can be reflected from said object; a condensing optical system to which said measurement light and said observation light are applied and which condenses the applied light; a light injecting portion, at a predetermined position on an optical path from said measurement-purpose light source to said condensing optical system, injecting said observation light; a light separating portion separating a reflected light generated at said object into a measurement reflected light and an observation reflected light; and an adjusting mechanism capable of changing a positional relation between said condensing optical system and said object, and said method comprising the steps of; generating said observation light by said observation-purpose light source; obtaining a reflected image from said observation reflected light separated by said light separating portion; driving said adjusting mechanism based on a state of focusing shown by said reflected image; generating said measurement light by said measurement-purpose light source; and measuring a spectrum of said measurement reflected light separated by said light separating portion. - View Dependent Claims (9)
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Specification