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Apparatus and Method For Nanoradian Metrology of Changes In Angular Orientation of A Vibrating Mirror Using Multi-Pass Optical Systems

  • US 20080285106A1
  • Filed: 05/15/2008
  • Published: 11/20/2008
  • Est. Priority Date: 05/18/2007
  • Status: Abandoned Application
First Claim
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1. A metrology system for measuring changes in orientation of a vibrating mirror, comprising an optical cavity that includes reflection of a measurement beam from the vibrating mirror, the optical cavity configured such that an object space that includes the vibrating mirror is a conjugate image of the same object space.

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