Arrangement and method to sense flow using mechanical stress microsensors
First Claim
Patent Images
1. A sensor module, comprising:
- a MEMs sensor device operable to determine a fluid flow induced mechanical force on a first flow control device connective element; and
a processing circuit operably coupled to receive fluid flow induced mechanical force information based on the determined fluid flow induced mechanical force, the processing circuit operable to generate a fluid flow measurement value based on the fluid flow induced mechanical force information and position information representative of a position of a flow control device coupled to the first flow control connective element.
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Abstract
A sensor module includes a MEMs sensor device and a processing circuit. The MEMs sensor device is operable to determine a fluid flow induced mechanical force on a first flow control device connective element. The processing circuit is operably coupled to receive fluid flow induced mechanical force information based on the determined fluid flow induced mechanical force. The processing circuit is configured to generate a fluid flow measurement value based on the fluid flow induced mechanical force information and position information representative of a position of a flow control device coupled to the first flow control connective element.
27 Citations
20 Claims
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1. A sensor module, comprising:
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a MEMs sensor device operable to determine a fluid flow induced mechanical force on a first flow control device connective element; and a processing circuit operably coupled to receive fluid flow induced mechanical force information based on the determined fluid flow induced mechanical force, the processing circuit operable to generate a fluid flow measurement value based on the fluid flow induced mechanical force information and position information representative of a position of a flow control device coupled to the first flow control connective element. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A sensor module, comprising:
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a MEMs sensor device operable to determine a liquid flow induced mechanical force on a first valve control element; a processing circuit operably coupled to receive liquid flow induced mechanical force information based on the determined liquid flow induced mechanical force, the processing circuit operable to generate a liquid flow measurement value based on the liquid flow induced mechanical force information; and a first wireless communication circuit operable to communicate information representative of the liquid flow measurement to a second wireless communication circuit. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20)
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Specification