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Arrangement and method to sense flow using mechanical stress microsensors

  • US 20080287052A1
  • Filed: 07/29/2008
  • Published: 11/20/2008
  • Est. Priority Date: 09/13/2005
  • Status: Active Grant
First Claim
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1. A sensor module, comprising:

  • a MEMs sensor device operable to determine a fluid flow induced mechanical force on a first flow control device connective element; and

    a processing circuit operably coupled to receive fluid flow induced mechanical force information based on the determined fluid flow induced mechanical force, the processing circuit operable to generate a fluid flow measurement value based on the fluid flow induced mechanical force information and position information representative of a position of a flow control device coupled to the first flow control connective element.

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