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PROJECTION OBJECTIVE WITH DECENTRALIZED CONTROL

  • US 20080288108A1
  • Filed: 06/19/2008
  • Published: 11/20/2008
  • Est. Priority Date: 12/22/2005
  • Status: Abandoned Application
First Claim
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1. An objective, comprising:

  • an optical element;

    a manipulator unit connected to the optical element, the manipulator unit comprising;

    an actuator;

    a sensor; and

    a decentralized control system; and

    a control system capable of being connected to the manipulator unit,wherein the decentralized control subsystem of the manipulator unit is capable of being connected to the control system via a data bus, the actuator and sensor of the manipulator unit are adapted to adjust the optical element, and the objective is configured to be used in semiconductor microlithography.

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