Sensor for detecting acceleration and angular velocity
First Claim
1. A sensor for detecting acceleration and angular velocity, comprising an acceleration detecting section and an angular velocity detecting section,the acceleration detecting section comprising:
- a weight body for acceleration detection;
a pedestal for acceleration detection arranged in such a manner as to surround the weight body for acceleration detection;
a flexible connection for acceleration detection for connecting the weight body for acceleration detection and the pedestal for acceleration detection;
a piezoresistive element embedded in a surface layer of the flexible connection for acceleration detection; and
an acceleration detecting circuit for detecting an applied acceleration based on a change in an electrical resistance of the piezoresistive element,the angular velocity detecting section comprising;
a weight body for angular velocity detection;
a pedestal for angular velocity detection arranged in such a manner as to surround the weight body for angular velocity detection;
a flexible connection for angular velocity detection for connecting the weight body for angular velocity detection and the pedestal for angular velocity detection;
a driving piezoelectric element and a detecting piezoelectric element fixed directly or indirectly to a surface of the flexible connection for angular velocity detection; and
an angular velocity detecting circuit for detecting an applied angular velocity based on a signal generated in the detecting piezoelectric element while supplying an alternating signal to the driving piezoelectric element to periodically deform the flexible connection for angular velocity detection and to generate a periodic motion of the weight body for angular velocity detection, whereinthe pedestal for acceleration detection and the pedestal for angular velocity detection form a monolithic structure and are fixed to a device chassis.
1 Assignment
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Accused Products
Abstract
Static and dynamic acceleration as well as static and dynamic angular velocity are detected with a simple structure. An acceleration detecting section includes a weight body, a pedestal around the weight body, flexible plate-like bridge portions, and piezoresistive elements embedded in the upper surface of the bridge portions. An angular velocity detecting section includes a weight body, a pedestal around the weight body, flexible plate-like bridge portions, and piezoelectric elements fixed to the upper surface of the bridge portions. The pedestals are fixed to a device chassis. When the weight body is displaced by acceleration, the plate-like bridge portions are deflected, so that the acceleration is detected based on the change in the electrical resistances of the piezoresistive elements. When the weight body is displaced by a Coriolis force based on angular velocity while supplying alternating signals to the piezoelectric elements to oscillate the weight body, the plate-like bridge portions are deflected, so that the angular velocity is detected based on charge generation in the piezoelectric elements.
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Citations
27 Claims
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1. A sensor for detecting acceleration and angular velocity, comprising an acceleration detecting section and an angular velocity detecting section,
the acceleration detecting section comprising: - a weight body for acceleration detection;
a pedestal for acceleration detection arranged in such a manner as to surround the weight body for acceleration detection;
a flexible connection for acceleration detection for connecting the weight body for acceleration detection and the pedestal for acceleration detection;
a piezoresistive element embedded in a surface layer of the flexible connection for acceleration detection; and
an acceleration detecting circuit for detecting an applied acceleration based on a change in an electrical resistance of the piezoresistive element,the angular velocity detecting section comprising;
a weight body for angular velocity detection;
a pedestal for angular velocity detection arranged in such a manner as to surround the weight body for angular velocity detection;
a flexible connection for angular velocity detection for connecting the weight body for angular velocity detection and the pedestal for angular velocity detection;
a driving piezoelectric element and a detecting piezoelectric element fixed directly or indirectly to a surface of the flexible connection for angular velocity detection; and
an angular velocity detecting circuit for detecting an applied angular velocity based on a signal generated in the detecting piezoelectric element while supplying an alternating signal to the driving piezoelectric element to periodically deform the flexible connection for angular velocity detection and to generate a periodic motion of the weight body for angular velocity detection, whereinthe pedestal for acceleration detection and the pedestal for angular velocity detection form a monolithic structure and are fixed to a device chassis. - View Dependent Claims (2, 3, 4, 5, 6, 7)
- a weight body for acceleration detection;
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8. A sensor for detecting acceleration and angular velocity, comprising:
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a weight body; a pedestal arranged in such a manner as to surround the weight body and fixed to a device chassis; a flexible connection for connecting the weight body and the pedestal; a piezoresistive element embedded in a surface layer of the flexible connection; a driving piezoelectric element and a detecting piezoelectric element fixed directly or indirectly to a surface of the flexible connection; an acceleration detecting circuit for detecting an applied acceleration based on a change in an electrical resistance of the piezoresistive element; and an angular velocity detecting circuit for detecting an applied angular velocity based on a signal generated in the detecting piezoelectric element while supplying an alternating signal to the driving piezoelectric element to periodically deform the flexible connection and to generate a periodic motion of the weight body. - View Dependent Claims (9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A sensor for detecting acceleration and angular velocity, comprising:
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a weight body; a pedestal arranged to a side of the weight body and fixed to a device chassis; a flexible connection for connecting the weight body and the pedestal; a piezoresistive element embedded in a surface layer of the flexible connection; a driving piezoelectric element and a detecting piezoelectric element fixed directly or indirectly to a surface of the flexible connection; an acceleration detecting circuit for detecting an applied acceleration based on a change in an electrical resistance of the piezoresistive element; and an angular velocity detecting circuit for detecting an applied angular velocity based on a signal generated in the detecting piezoelectric element while supplying an alternating signal to the driving piezoelectric element to periodically deform the flexible connection and to generate a periodic motion of the weight body. - View Dependent Claims (19, 20, 21, 22, 23, 24, 25, 26, 27)
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Specification