CONSTANT TEMPERATURE CONTROLLER

• US 20080289811A1
• Filed: 03/05/2008
• Published: 11/27/2008
• Est. Priority Date: 05/23/2007
• Status: Abandoned Application

• Current Assignee: ATS Japan Corp. (Raytheon Technologies Corporation d/b/a RTX)
• Original Assignee: ATS Japan Corp. (Raytheon Technologies Corporation d/b/a RTX)
• Inventors: Kariya, Tomoyuki
• Application Number:
  US12/042,875
• Publication Number:
  US 20080289811A1
• Time in Patent Office: Days
• US Class Current: 165/300
• CPC Class Codes: F24D 19/1033 motor operated
• CPC Class Codes: G05D 23/1393 characterised by the use of electric means

Abstract

Cool fluid of a predetermined temperature is supplied to a three-way valve 20 of a sub unit 2 from a cooling side tank 43 of a main unit 1 of a controller, through a supply pipe 14. Hot fluid of a predetermined temperature is supplied to the three-way valve 20 from a heating side tank 44 through another supply pipe 15. The cool and hot fluids are mixed in a predetermined ratio by the three-way valve 20 according to a temperature of the external heat load 7, and supplied to a heat exchange chamber of the external heat load 7, to maintain the temperature thereof at a target temperature. The temperature of the external heat load 7 is measured by one of a sensor 72 in a processing chamber, a sensor 23 in a constant temperature fluid supply pipe, and a sensor 24 in a constant temperature fluid return pipe, for feedback control of aperture of the three-way valve 20. Thereby, the highly heat-responsive and accurate constant temperature controller which is capable of following up sharp temperature fluctuation of an external heat load is provided.

Claims

1. A constant temperature controller that controls a temperature of an external heat load apparatus through indirect heat exchange with a circulating heat medium fluid, comprising a main unit, including a high-temperature circulating heat medium fluid preparation unit that produces a high-temperature circulating heat medium fluid adjusted to a predetermined temperature and a low-temperature circulating heat medium fluid preparation unit that produces a low-temperature circulating heat medium fluid adjusted to a predetermined temperature;

and a sub unit including a constant temperature circulating heat medium fluid preparation unit that directly mixes the high-temperature circulating heat medium fluid and the low-temperature circulating heat medium fluid and controls a flow volume ratio between the high-temperature circulating heat medium fluid and the low-temperature circulating heat medium fluid according to a temperature of the external heat load apparatus, to thereby produce a circulating heat medium fluid of a predetermined target temperature.

2. The constant temperature controller according to claim 1, wherein the high-temperature circulating heat medium fluid preparation unit employs, as a heat source thereof, at least one of a high-temperature side heat medium obtained from a freezer cycle, a heater, and plant utility water, and the low-temperature circulating heat medium fluid preparation unit employs, as a heat source thereof, at least one of a lower-temperature side heat medium obtained from the freezer cycle, a heater, and the plant utility water.

3. The constant temperature controller according to claim 2, wherein the high-temperature side heat medium obtained from the freezer cycle is employed as the heat source for the high-temperature circulating heat medium fluid preparation unit, and the low-temperature side heat medium obtained from the freezer cycle is employed as the heat source for the low-temperature circulating heat medium fluid preparation unit.

4. The constant temperature controller according to claim 2, wherein the heater is employed as the heat source for the high-temperature circulating heat medium fluid preparation unit, and the plant utility water is employed as the heat source for the low-temperature circulating heat medium fluid preparation unit.

5. The constant temperature controller according to claim 2, wherein the heater is employed as the heat source for the high-temperature circulating heat medium fluid preparation unit, and the lower-temperature side heat medium obtained from the freezer cycle is employed as the heat source for the low-temperature circulating heat medium fluid preparation unit.

6. The constant temperature controller according to claim 2, wherein the plant utility water is employed as the heat source for the high-temperature circulating heat medium fluid preparation unit, and the lower-temperature side heat medium obtained from the freezer cycle is employed as the heat source for the low-temperature circulating heat medium fluid preparation unit.

7. The constant temperature controller according to claim 1, further comprising a three-way valve having an inlet port through which the high-temperature circulating heat medium fluid is introduced, an inlet port through which the low-temperature circulating heat medium fluid is introduced, an outlet port through which the constant temperature circulating heat medium fluid is discharged, and a control valve that controls a flow volume ratio between the high-temperature circulating heat medium fluid and the low-temperature circulating heat medium fluid;

a stirring, mixing and emitting unit that stirs, mixes and emits the constant temperature circulating heat medium fluid; and

a three-way valve control unit that controls aperture of the control valve of the three-way valve, according to the temperature of the external heat load apparatus.

8. The constant temperature controller according to claim 7, wherein the three-way valve control unit has a feedback control function for controlling the flow volume ratio between the high-temperature circulating heat medium fluid and the low-temperature circulating heat medium fluid introduced thereinto, according to one of a temperature of the constant temperature circulating heat medium fluid being supplied to the external heat load apparatus, a temperature of the constant temperature circulating heat medium fluid being discharged from the external heat load apparatus, and a temperature of the working point of the external heat load apparatus.

9. The constant temperature controller according to claim 7, wherein one of a stepping motor, a servo motor, and an air pressure-driven diaphragm is employed as a power unit of the control valve.

10. The constant temperature controller according to claim 8, wherein the feedback function includes a PID control function.

11. The constant temperature controller according to claim 7, wherein a turbo type fluid pump is employed as the stirring, mixing and emitting unit.

12. The constant temperature controller according to claim 11, wherein the turbo type fluid pump is driven by an inverter.

13. The constant temperature controller according to claim 11, wherein one of a centrifugal pump, a diffuser pump, and a cascade pump is employed as the turbo type fluid pump.

14. The constant temperature controller according to claim 1, wherein the main unit and the sub unit are separated from each other, and connected via a supply pipe of the high-temperature circulating heat medium fluid, a supply pipe of the low-temperature circulating heat medium fluid, and a return pipe of the constant temperature circulating heat medium fluid, and the sub unit is located close to the external heat load apparatus.