SENSOR AND IMAGE PICKUP DEVICE
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Accused Products
Abstract
A sensor for detecting a received electromagnetic wave comprising a first electrode, a second electrode and an amorphous oxide layer interposed between the first electrode and the second electrode.
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Citations
26 Claims
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1-10. -10. (canceled)
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11. An image pickup device comprising:
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a flexible substrate; an X-ray sensor arranged on the flexible substrate; and a field effect transistor for reading a signal from the X-ray sensor, wherein; the field effect transistor has an amorphous oxide as an active layer; and the amorphous oxide comprises one of an oxide having an electron carrier concentration of less than 1018/cm3 and an oxide whose electron mobility tends to increase with increasing electron carrier concentration. - View Dependent Claims (12, 13, 15, 17)
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14. (canceled)
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16. An image pickup device comprising:
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a substrate having a non-flat region; an X-ray sensor provided on the substrate; and a field effect transistor for reading a signal from the X-ray sensor, wherein the field effect transistor is a normally-off transistor having an active layer composed of an amorphous oxide.
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18. An image pickup device comprising:
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a sensor for detecting an electromagnetic wave; and a field effect transistor for reading a signal from the sensor, wherein the field effect transistor has an amorphous oxide semiconductor as an active layer; and
the amorphous oxide semiconductor layer is composed of an oxide of a metal material selected from at least one of In, Zn and Sn. - View Dependent Claims (19, 20, 21, 22)
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23. An image pickup device comprising:
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a substrate; an X-ray sensor arranged on the substrate; and a field effect transistor for reading a signal from the X-ray sensor, wherein; the field effect transistor has an amorphous oxide as an active layer; and the amorphous oxide comprises one of an oxide having an electron carrier concentration of less than 1018/cm3 and an oxide whose electron mobility tends to increase with increasing electron carrier concentration. - View Dependent Claims (24)
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25. An image pickup device comprising:
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a substrate; an X-ray sensor provided on the substrate; and a field effect transistor for reading a signal from the X-ray sensor, wherein the field effect transistor is a normally-off transistor having an active layer composed of an amorphous oxide. - View Dependent Claims (26)
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Specification