TRANSFER CHAMBER FOR FLAT DISPLAY DEVICE MANUFACTURING APPARATUS

• US 20080292431A1
• Filed: 05/29/2008
• Published: 11/27/2008
• Est. Priority Date: 11/04/2003
• Status: Active Grant

• Current Assignee: Advanced Display Process Engineering Co., Ltd.
• Original Assignee: Advanced Display Process Engineering Co., Ltd.
• Inventors: Choi, Jun Young, Lee, Cheol Won, Lee, Sang Baek, Hur, Gwang Ho
• Granted Patent: US 7,665,947 B2
• Time in Patent Office: Days
• US Class Current: 414/217
• CPC Class Codes: H01L 21/67742 Mechanical parts of transfer devices robots in general in B25J
• CPC Class Codes: H01L 21/68707 the wafers being placed on a robot blade, or gripped by a gripper for conveyance
• CPC Class Codes: Y10S 414/139 including wafer charging or discharging means for vacuum chamber
• CPC Class Codes: Y10S 414/141 includes means for gripping wafer

Abstract

The present invention relates to a transfer chamber for a flat display device manufacturing apparatus, and more particularly, to a transfer chamber for a flat display device manufacturing apparatus, having a combination of functions of transfer and load-lock chambers, in which a robot is provided aside from a center of the transfer chamber, a buffer is provided to be driven without interference of the robot, and a aligner is provided to adjust a position of a substrate mounted on the buffer. In order to achieve the aforementioned objects, there is provided a transfer chamber for a flat display device manufacturing apparatus, wherein a robot is provided aside from a center of the transfer chamber. In addition, in order to drive the robot, a sealing member is provided to seal a hole formed at a predetermined portion of the transfer chamber, and an aligner for adjusting the substrate in the transfer chamber and a buffer where the substrate is mounted on are provided.

Claims

1. A transfer chamber for a flat display device manufacturing apparatus, comprising a robot having a robot shaft, a robot arm, and a robot hand wherein the robot is provided aside from a center of the transfer chamber, wherein the transfer chamber comprises first substrate-position adjusting members for adjusting the x-directional movement of a substrate and second substrate-position adjusting members for adjusting the y-directional movement of the substrate.

2. The transfer chamber for a flat display device manufacturing apparatus according to claim 1, wherein each of the first substrate-position adjusting members 1000 comprises:

a first substrate contacting member;

a first supporting member connected to an end portion of the first substrate contacting member;

a first driving unit connected to the other end portion of the first substrate contacting member.

3. The transfer chamber for a flat display device manufacturing apparatus according to claim 1, wherein two first substrate contacting members are provided at both sides of the transfer chamber.

4. The transfer chamber for a flat display device manufacturing apparatus according to claim 2,

wherein the first supporting member is connected to pass through a wall of the transfer chamber, and

wherein the first supporting member has a structure of sliding the first substrate contacting member.

5. The transfer chamber for a flat display device manufacturing apparatus according to claim 2,

wherein the first driving unit is provided to pass through the wall of the transfer chamber, and

wherein the first driving unit has a structure of moving the first substrate contacting member.

6. The transfer chamber for a flat display device manufacturing apparatus according to claim 2, wherein the first driving unit further comprises a first driving member for driving the first substrate contacting member.

7. The transfer chamber for a flat display device manufacturing apparatus according to claim 5, wherein the first driving member is connected to the first substrate contacting member via a first bellow module.

8. The transfer chamber for a flat display device manufacturing apparatus according to claim 2, wherein a plurality of first contacting pieces are provided in a predetermined interval on the first substrate contacting member.

9. The transfer chamber for a flat display device manufacturing apparatus according to claim 7, wherein each of the first contacting pieces pivotally rotates around its own axis.

10. The transfer chamber for a flat display device manufacturing apparatus according to claim 7, wherein the first contacting pieces are made of an engineering plastic material.

11. The transfer chamber for a flat display device manufacturing apparatus according to claim 9, wherein the engineering plastic material is teflon.

12. The transfer chamber for a flat display device manufacturing apparatus according to claim 2, wherein the first driving member further comprises a first-substrate-contacting-member control member.

13. The transfer chamber for a flat display device manufacturing apparatus according to claim 1, wherein each of the second substrate-position adjusting members comprises:

a second substrate contacting member;

second supporting members connected to both end portions of the second substrate contacting member; and

a second driving unit connected to a central portion of the second substrate contacting member.

14. The transfer chamber for a flat display device manufacturing apparatus according to claim 1, wherein two second substrate-position adjusting members are provided at the both sides of the transfer chamber where the first substrate-position adjusting members are not provided.

15. The transfer chamber for a flat display device manufacturing apparatus according to claim 12,

wherein the second supporting members are provided to pass through the wall of the transfer chamber, and

wherein the second supporting members have a structure of horizontally slide the second substrate contacting member in the y direction.

16. The transfer chamber for a flat display device manufacturing apparatus according to claim 12,

wherein the second driving unit is provided to pass through the wall of the transfer chamber, and

wherein the second driving unit has a structure of slinging the second substrate contacting member.

17. The transfer chamber for a flat display device manufacturing apparatus according to claim 12, wherein the second driving unit further comprises a second driving member for driving the second substrate contacting member.

18. The transfer chamber for a flat display device manufacturing apparatus according to claim 16, wherein the second driving member is connected to the second substrate contacting member via a second bellows module.

19. The transfer chamber for a flat display device manufacturing apparatus according to claim 12, wherein a plurality of second contacting pieces are provided in a predetermined interval on the second substrate contacting member.

20. The transfer chamber for a flat display device manufacturing apparatus according to claim 18, wherein each of the second contacting pieces pivotally rotates around its own axis.

21. The transfer chamber for a flat display device manufacturing apparatus according to claim 18, wherein the second contacting pieces are made of an engineering plastic material.

22. The transfer chamber for a flat display device manufacturing apparatus according to claim 20, wherein the engineering plastic material is teflon.

23. The transfer chamber for a flat display device manufacturing apparatus according to claim 12, wherein the second driving member further comprises a second-substrate-contacting-member control member.