POST LAST WIRING LEVEL INDUCTOR USING PATTERNED PLATE PROCESS
First Claim
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1. A method of forming a semiconductor device, comprising:
- providing a substrate having at least one metal wiring level within the substrate;
depositing an insulative layer on a surface of the substrate;
forming an inductor within the insulative layer using a patterned plate process; and
forming a wire bond pad within the insulative layer, wherein at least a portion of the wire bond pad is substantially co-planar with the inductor.
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Abstract
A method of a semiconductor device. A substrate is provided. At least one metal wiring level is within the substrate. An insulative layer is deposited on a surface of the substrate. An inductor is formed within the insulative layer using a patterned plate process. A wire bond pad is formed within the insulative layer, wherein at least a portion of the wire bond pad is substantially co-planar with the inductor.
37 Citations
6 Claims
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1. A method of forming a semiconductor device, comprising:
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providing a substrate having at least one metal wiring level within the substrate; depositing an insulative layer on a surface of the substrate; forming an inductor within the insulative layer using a patterned plate process; and forming a wire bond pad within the insulative layer, wherein at least a portion of the wire bond pad is substantially co-planar with the inductor. - View Dependent Claims (2, 3, 4, 5, 6)
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Specification