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Stage yield prediction

  • US 20080295047A1
  • Filed: 05/22/2008
  • Published: 11/27/2008
  • Est. Priority Date: 05/24/2007
  • Status: Active Grant
First Claim
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1. A computer-implemented method comprising:

  • receiving defectivity data identifying one or more defects associated with one or more previous wafer designs;

    dividing the defects associated with one or more design elements of the previous wafer designs into systematic defects and random defects;

    for each design layout of a new wafer design, predicting a yield separately for the systematic defects and the random defects; and

    calculating a combined yield based on the yield predicted for the systematic defects and the yield predicted for the random defects.

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