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APPARATUS AND METHODS FOR IMPROVING TREATMENT UNIFORMITY IN A PLASMA PROCESS

  • US 20080296261A1
  • Filed: 05/22/2008
  • Published: 12/04/2008
  • Est. Priority Date: 06/01/2007
  • Status: Abandoned Application
First Claim
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1. An apparatus for use in plasma processing a workpiece having an outer peripheral edge, the apparatus comprising:

  • a sacrificial body composed of a plasma-removable material, said sacrificial body adapted to be arranged about the outer peripheral edge of the workpiece so that an outer diameter of the workpiece is effectively increased.

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