Spatial light modulator
First Claim
Patent Images
1. A spatial light modulator, comprising:
- a substrate having a plurality of electrodes;
a mirror plate suspended over the plurality of electrodes, the mirror plate having an upper reflective surface and a lower surface, the mirror plate having an upper layer and a lower layer, the upper layer formed of a first material and the lower layer formed of a different second material, the upper layer having the upper reflective surface, and a recess in the lower surface that extends partially but not entirely through the lower layer;
a support post on the substrate; and
a torsion hinge connecting the support post to the mirror plate, the torsion hinge positioned in the recess of the mirror plate and permitting the mirror plate to rotate about an axis of the torsion hinge.
1 Assignment
0 Petitions
Accused Products
Abstract
A high contrast spatial light modulator for display and printing is fabricated by coupling a high active reflection area fill-ratio and non-diffractive micro-mirror array with a high electrostatic efficiency and low surface adhesion control substrate.
36 Citations
56 Claims
-
1. A spatial light modulator, comprising:
-
a substrate having a plurality of electrodes; a mirror plate suspended over the plurality of electrodes, the mirror plate having an upper reflective surface and a lower surface, the mirror plate having an upper layer and a lower layer, the upper layer formed of a first material and the lower layer formed of a different second material, the upper layer having the upper reflective surface, and a recess in the lower surface that extends partially but not entirely through the lower layer; a support post on the substrate; and a torsion hinge connecting the support post to the mirror plate, the torsion hinge positioned in the recess of the mirror plate and permitting the mirror plate to rotate about an axis of the torsion hinge. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
-
-
21. A spatial light modulator, comprising:
-
a substrate having a plurality of electrodes; a mirror plate suspended over the plurality of electrodes, the mirror plate having an upper reflective surface and a lower surface; a support post on the substrate; a torsion hinge connecting the support post to the mirror plate, the torsion hinge permitting the mirror plate to rotate about an axis of the torsion hinge; and a landing tip on the substrate, the landing tip projecting above at least some of the plurality of electrodes and configured to contact the lower surface of the mirror plate to limit the rotation of the mirror plate. - View Dependent Claims (22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40)
-
-
41. A spatial light modulator, comprising:
-
a substrate; a plurality of electrodes formed on the substrate, at least one of the plurality of electrodes having a first region and a second region; a mirror plate suspended over the plurality of electrodes, the mirror plate having an upper reflective surface and a lower surface, wherein there is a first gap of a first distance between the first region and the lower surface of the mirror plate and a second gap of second distance greater than the first distance between the second region and the lower surface of the mirror plate; a support post on the substrate; and a torsion hinge connecting the support post to the mirror plate, the torsion hinge permitting the mirror plate to rotate about an axis of the torsion hinge. - View Dependent Claims (42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 53, 54, 55, 56)
-
Specification