METHODS OF MAKING CARBON NANOTUBE FILMS, LAYERS, FABRICS, RIBBONS, ELEMENTS AND ARTICLES

• US 20080299307A1
• Filed: 01/13/2003
• Published: 12/04/2008
• Est. Priority Date: 07/25/2001
• Status: Active Grant

• Current Assignee: ZEON Corporation
• Original Assignee: Nantero Incorporated
• Inventors: Ward, Jonathan W., Segal, Brent M., Rueckes, Thomas
• Granted Patent: US 7,566,478 B2
• Time in Patent Office: Days
• US Class Current: 427/249.1
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: B82Y 30/00 Nanotechnology for materials or surface science, e.g. nanocomposites
• CPC Class Codes: B82Y 40/00 Manufacture or treatment of nanostructures
• CPC Class Codes: C01B 2202/02 Single-walled nanotubes
• CPC Class Codes: C01B 2202/22 Electronic properties
• CPC Class Codes: C01B 32/162 characterised by catalysts
• CPC Class Codes: G11C 13/025 using fullerenes, e.g. C60, or nanotubes, e.g. carbon or silicon nanotubes
• CPC Class Codes: G11C 2213/16 Memory cell being a nanotube, e.g. suspended nanotube
• CPC Class Codes: G11C 2213/81 Array wherein the array conductors, e.g. word lines, bit lines, are made of nanowires
• CPC Class Codes: G11C 23/00 Digital stores characterised by movement of mechanical parts to effect storage, e.g. using balls; Storage elements therefor
• CPC Class Codes: H01L 21/76838 characterised by the formation and the after-treatment of the conductors etching for patterning the conductors H01L21/3213
• CPC Class Codes: H01L 2221/1094 Conducting structures comprising nanotubes or nanowires
• CPC Class Codes: Y10S 977/843 Gas phase catalytic growth, i.e. chemical vapor deposition

Abstract

Methods of Making Carbon Nanotube Films, Layers, Fabrics, Ribbons, Elements and Articles are disclosed. Carbon nanotube growth catalyst is applied on to a surface of a substrate. The substrate is subjected to a chemical vapor deposition of a carbon-containing gas to grow a non-woven fabric of carbon nanotubes. Portions of the non-woven fabric are selectively removed according to a defined pattern to create the article. A non-woven fabric of carbon nanotubes may be made by applying carbon nanotube growth catalyst on to a surface of a wafer substrate to create a dispersed monolayer of catalyst. The substrate is subjected to a chemical vapor deposition of a carbon-containing gas to grow a non-woven fabric of carbon nanotubes in contact and covering the surface of the wafer and in which the fabric is substantially uniform density.

Claims

1. A method of making an article, comprising:

applying carbon nanotube growth catalyst on to a surface of a substrate;

subjecting the substrate to a chemical vapor deposition of a carbon-containing gas to grow a non-woven fabric of carbon nanotubes, wherein the nanotubes of the fabric are substantially parallel to said surface of the substrate;

selectively removing portions of the non-woven fabric according to a defined patterns; and

providing first and second electrodes in contact with respective first and second portions of the patterned non-woven fabric to create the article, wherein the patterned non-woven fabric forms a conductive trace between the first and second electrodes.

2. The method of claim 1 wherein the act of applying carbon nanotube growth catalyst on to a surface of a substrate includes applying metallic nanoparticles.

3. The method of claim 1 wherein the act of applying carbon nanotube growth catalyst on to a surface of a substrate includes applying metal oxide nanoparticles.

4. The method of claim 1 further including derivitizing the surface of the substrate.

5. The method of claim 4 wherein the surface is derivitized to create a more hydrophobic environment to promote adhesion of the carbon nanotube growth catalyst.

6. The method of claim 4 wherein the surface is derivitized to create a more hydrophilic environment to promote adhesion of the carbon nanotube growth catalyst.

7. The method of claim 1 wherein the act of applying carbon nanotube growth catalyst on to a surface of a substrate includes applying a ferritin solution.

8. The method of claim 1 wherein the act of applying carbon nanotube growth catalyst creates a substantial monolayer of nanoparticles on the surface of the substrate.

9. The method of claim 1 wherein the act of applying carbon nanotube growth catalyst on to a surface of a substrate includes applying a metal ligand-catalyst precursor.

10. The method of claim 9 wherein the surface is functionalized to promote binding of the ligand.

11. The method of claim 9 wherein the metal ligand-catalyst precursor has a formula ML, in which M is metal from a group including iron, cobalt, or nickel, and in which L is at least one organic ligand.

12. The method of claim 9 wherein the metal ligand-catalyst precursor is applied by a spin coating technique.

13. The method of claim 9 in which the metal ligand-catalyst precursor is oxidized to remove an organic shell therefrom.

14. The method of claim 1 wherein the act of applying carbon nanotube growth catalyst on to a surface of a substrate includes applying a solution of iron oxide nanoparticles on the surface of the substrate.

15. The method of claim 14 wherein the solution of iron oxide nanoparticles is applied by a spin coating technique.

16. The method of claim 15 wherein the spin coating technique includes repetitive applications of the solution of iron oxide nanoparticles and repetitive distributing thereof by spinning the substrate at a defined rate.

17. The method of claim 1 wherein the act of applying carbon nanotube growth catalyst on to a surface of a substrate includes applying a suspension of liquid metal catalyst precursor on the surface of the substrate.

18. The method of claim 1 wherein the carbon-containing gas is methane.

19. The method of claim 1 wherein the carbon-containing gas is ethylene.

20. The method of claim 18 wherein chemical vapor deposition is at about 850°

C. for about ten minutes and the methane is applied at about a 500 sccm flow.

21. The method of claim 19 wherein chemical vapor deposition is at about 800°

C. for about forty minutes and the ethylene is applied at about a 10 sccm flow.

22. The method of claim 1 wherein the act of subjecting the substrate to chemical vapor deposition includes inert gasses.

23. The method of claim 22 wherein the inert gasses are a controlled flow of Argon and Hydrogen.

24. The method of claim 23 wherein Argon and Hydrogen are flowed in a controlled ratio of 1:

4.

25. The method of claim 1 further including oxidizing the substrate prior to chemical vapor deposition.

26. The method of claim 1 wherein the nanotube growth catalysts are nanoparticles having specific diameters.

27. The method of claim 1 wherein the carbon nanotubes of the non-woven fabric include metallic nanotubes and semiconducting nanotubes and wherein the relative composition of metallic and semiconducting nanotubes in the fabric is controlled.

28. The method of claim 1 wherein the carbon nanotubes of the non-woven fabric include metallic nanotubes and semiconducting nanotubes and wherein the method further includes selectively removing metallic nanotubes.

29. The method of claim 1 wherein the carbon nanotubes of the non-woven fabric include metallic nanotubes and semiconducting nanotubes and wherein the method further includes selectively removing semiconducting nanotubes.

30. A method of making a non-woven fabric of carbon nanotubes, comprising:

applying carbon nanotube growth catalyst on to a surface of a wafer substrate to create a dispersed monolayer of catalyst;

subjecting the substrate to a chemical vapor deposition of a carbon-containing gas to grow a non-woven fabric of carbon nanotubes in contact and covering the surface of the wafer and wherein the fabric is of substantially uniform density.

31. The method of claim 30 wherein the nanotubes are single-walled carbon nanotubes.

32. The method of claim 30 wherein the fabric is primarily a monolayer of nanotubes.

33. The method of claim 30 wherein the fabric is about 2 nm or less in thickness.