PLASMA PROCESSING SYSTEM AND USE THEREOF
First Claim
1. A plasma processing system that excites a gas using an electromagnetic wave and applies a plasma process to a target object, the system comprising:
- a processing chamber;
an electromagnetic source that outputs an electromagnetic wave;
a dielectric plate on the inner wall of the processing chamber, the dielectric plate transmitting the electromagnetic wave into the processing chamber;
a conductor rod adjacent to the dielectric plate, the conductor rod transferring the electromagnetic wave to the dielectric plate;
a metal electrode coupled to the conductor rod to hold the dielectric plate; and
a device to give the conductor rod a force directed away from the processing chamber.
1 Assignment
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Accused Products
Abstract
A plasma processing system 10 includes a processing chamber 100, a microwave source 700 that outputs a microwave, a coaxial waveguide 315 that transfers the microwave from the microwave source, a plurality of dielectric plates 305 that transmit the microwave transferred through the coaxial waveguide 315 and discharge the microwave into the processing chamber 100, and a metal electrode 310 having a first end and a second end, the first end coupled to the coaxial waveguide 315, the second end disposed on the surface of the dielectric plate 305 facing the substrate. The coaxial waveguide 315 holds the dielectric plate 305 and metal electrode 310 and is securely fastened by a fastening mechanism 500. The coaxial waveguide 315 is given a force by the spring member 515, the force being directed away from the processing chamber 100.
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Citations
31 Claims
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1. A plasma processing system that excites a gas using an electromagnetic wave and applies a plasma process to a target object, the system comprising:
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a processing chamber; an electromagnetic source that outputs an electromagnetic wave; a dielectric plate on the inner wall of the processing chamber, the dielectric plate transmitting the electromagnetic wave into the processing chamber; a conductor rod adjacent to the dielectric plate, the conductor rod transferring the electromagnetic wave to the dielectric plate; a metal electrode coupled to the conductor rod to hold the dielectric plate; and a device to give the conductor rod a force directed away from the processing chamber. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29)
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30. A method of using a plasma processing system, the method comprising:
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outputting an electromagnetic wave at a frequency of 1 GHz or less from an electromagnetic source; transferring the electromagnetic wave to a conductor rod, the conductor rod being raised by a device to give the conductor rod a force directed away from a processing chamber, the conductor rod being coupled to a metal electrode to hold a dielectric plate; transferring the electromagnetic wave transferred through the conductor rod to the dielectric plate adjacent to the conductor rod; and exciting a process gas using the electromagnetic wave transmitted by the dielectric plate and introduced into the processing chamber and applying a desired plasma processing to a target object.
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31. A method of cleaning a plasma processing system, the method comprising:
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outputting an electromagnetic wave at a frequency of 1 GHz or less from an electromagnetic source; transferring the electromagnetic wave to a conductor rod raised by a device to give the conductor rod a force directed away from a processing chamber, the conductor rod being coupled to a metal electrode to hold a dielectric plate; transferring the electromagnetic wave transferred through the conductor rod to the dielectric plate adjacent to the conductor rod; and exciting a cleaning gas using the electromagnetic wave transmitted by the dielectric plate and introduced into the processing chamber and cleaning the plasma processing system.
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Specification