Extreme ultra-violet lithographic apparatus and device manufacturing method
First Claim
1. An extreme ultra-violet lithographic apparatus for imaging a pattern onto a substrate, said apparatus comprising:
- a radiation system constructed and arranged to provide a beam of an extreme ultra-violet radiation;
an absorber arranged in the beam and constructed and arranged to absorb at least a portion of the radiation beam, said absorber having a volume configured to accommodate a flow of an absorbing gas, the flow being directed in a transverse direction with respect to the beam, said absorber comprising a structure having an extreme ultra-violet radiation-transmissive beam entry area and an extreme ultra-violet radiation-transmissive beam exit area; and
a gas inlet actuator array configured to inject said gas into the volume and a gas outlet actuator array arranged to evacuate the gas from the volume.
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Accused Products
Abstract
An extreme ultra-violet lithographic apparatus for imaging a pattern onto a substrate includes a radiation system constructed and arranged to provide a beam of an extreme ultra-violet radiation, and an absorber arranged in the beam and constructed and arranged to absorb at least a portion of the radiation beam. The absorber has a volume configured to accommodate a flow of an absorbing gas. The flow is directed in a transverse direction with respect to the beam. The absorber includes a structure having an extreme ultra-violet radiation-transmissive beam entry area and an extreme ultra-violet radiation-transmissive beam exit area. The apparatus also includes a gas inlet actuator array configured to inject the gas into the volume and a gas outlet actuator array arranged to evacuate the gas from the volume.
6 Citations
20 Claims
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1. An extreme ultra-violet lithographic apparatus for imaging a pattern onto a substrate, said apparatus comprising:
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a radiation system constructed and arranged to provide a beam of an extreme ultra-violet radiation; an absorber arranged in the beam and constructed and arranged to absorb at least a portion of the radiation beam, said absorber having a volume configured to accommodate a flow of an absorbing gas, the flow being directed in a transverse direction with respect to the beam, said absorber comprising a structure having an extreme ultra-violet radiation-transmissive beam entry area and an extreme ultra-violet radiation-transmissive beam exit area; and a gas inlet actuator array configured to inject said gas into the volume and a gas outlet actuator array arranged to evacuate the gas from the volume. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A device manufacturing method comprising:
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patterning an extreme ultra-violet radiation beam; projecting the patterned radiation beam onto a target portion of a substrate, and controlling an intensity of the radiation beam with an absorber arranged in the beam by absorbing at least a portion of the radiation beam as the radiation beam passes through the absorber, said absorber having a volume accommodating a transverse flow of an absorbing gas with respect to the beam. - View Dependent Claims (15, 16, 17, 18, 19, 20)
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Specification