METHODS FOR VISUALLY INSPECTING INTERFEROMETRIC MODULATORS FOR DEFECTS
First Claim
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1. A method of testing an array of interferometric modulators, the method comprising:
- applying a first signal at least partly contemporaneously to a first plurality of non-adjacent columns of interferometric modulators, the first signal comprising at least one hold time signal portion of a voltage which is less than an actuation voltage and greater than a release voltage and at least one pulse having a voltage greater than the actuation voltage or less than the release voltage; and
inspecting said array of interferometric modulators to identify defects in said array, wherein said inspecting is performed during the hold time signal portion.
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Abstract
A method is provided for visual inspection of an array of interferometric modulators in various driven states. This method may include driving multiple columns or rows of interferometric modulators via a single test pad or test lead, such as test pad, and then observing the array for discrepancies between the expected optical output and the actual optical output of the array. This method may particularly include, for example, driving a set of non-adjacent rows or columns to a state different from the intervening rows or columns and then observing the optical output of the array.
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Citations
28 Claims
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1. A method of testing an array of interferometric modulators, the method comprising:
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applying a first signal at least partly contemporaneously to a first plurality of non-adjacent columns of interferometric modulators, the first signal comprising at least one hold time signal portion of a voltage which is less than an actuation voltage and greater than a release voltage and at least one pulse having a voltage greater than the actuation voltage or less than the release voltage; and inspecting said array of interferometric modulators to identify defects in said array, wherein said inspecting is performed during the hold time signal portion. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A method of testing an array of interferometric modulators, the method comprising:
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applying a first waveform at least partly contemporaneously to each of a first plurality of non-adjacent rows of interferometric modulators; applying a second waveform at least partly contemporaneously to each of a second plurality of non-adjacent rows of interferometric modulators; applying a third waveform at least partly contemporaneously to each of a first plurality of non-adjacent columns of interferometric modulators; applying a fourth waveform at least partly contemporaneously to each of a second plurality of non-adjacent columns of interferometric modulators; and inspecting said array of interferometric modulators to identify defects in the array, wherein at least one of the first, second, third, or fourth waveforms comprises at least one hold time signal portion of a voltage which is less than an actuation voltage and greater than a release voltage and at least one pulse having a voltage greater than the actuation voltage or less than the release voltage, and wherein the sum of the first and third waveforms or the sum of the second and fourth waveforms causes an interferometric modulator to actuate. - View Dependent Claims (9, 10, 11, 12, 13, 14, 15, 16)
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17. A method of inspecting an array of interferometric modulators, comprising:
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driving each modulator in the array of interferometric modulators to a known first state; applying a pulse to a subset of columns of interferometric modulators to drive the interferometric modulators within the array from the known first state to a second state, wherein said second state is the opposite of said first state; and inspecting said array of interferometric modulators to identify defects in the array after application of the pulse. - View Dependent Claims (18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28)
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Specification