System and Method For Producing Carbon Nanotubes
First Claim
1. A system for producing carbon nanotubes, comprising:
- a reaction chamber in which a process is performed for producing a carbon nanotube on a synthetic substrate;
a station part disposed at one side of the reaction chamber and provided with a first transporter for loading/unloading the synthetic substrate to/from the reaction chamber; and
a substrate accommodating part in which the synthetic substrate to be loaded to the reaction chamber is accommodated or the synthetic substrate unloaded from the reaction chamber waits.
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Abstract
A system for producing carbon nanotubes includes a reaction chamber in which a process is performed for producing a carbon nanotube on a synthetic substrate; a station part disposed at one side of the reaction chamber and provided with a first transporter for loading/unloading the synthetic substrate to/from the reaction chamber; a first transporter installed inside the station part for loading/unloading synthetic substrates to/from the reaction chamber; a substrate accommodating part in which a substrate to be loaded to the reaction chamber is accommodated or a synthetic substrate unloaded from the reaction chamber waits; a retrieve part for drawing out a synthetic substrate from the substrate accommodating part to retrieve a carbon nanotube produced on the synthetic substrate; a catalyst coating unit configured for coating a synthetic substrate with a catalyst before the synthetic substrate is accommodated in the substrate accommodating part of the station part; and a second transporter for transporting a synthetic substrate between the retrieve part and the substrate accommodating part and between the catalyst coating unit and the substrate accommodating part.
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Citations
38 Claims
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1. A system for producing carbon nanotubes, comprising:
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a reaction chamber in which a process is performed for producing a carbon nanotube on a synthetic substrate; a station part disposed at one side of the reaction chamber and provided with a first transporter for loading/unloading the synthetic substrate to/from the reaction chamber; and a substrate accommodating part in which the synthetic substrate to be loaded to the reaction chamber is accommodated or the synthetic substrate unloaded from the reaction chamber waits. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21)
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22. A system for producing carbon nanotubes, comprising:
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a reaction chamber in which a process is performed for producing a carbon nanotube on a synthetic substrate; a station part connected to one side of the reaction chamber and has a internal space that is isolated from the outside to prevent the synthetic substrate unloaded from the reaction chamber from contacting oxygen; a first transporter installed inside the station part for loading/unloading synthetic substrates to/from the reaction chamber; a substrate accommodating part in which the substrate to be loaded to the reaction chamber is accommodated or the synthetic substrate unloaded from the reaction chamber waits; a retrieve part for drawing out the synthetic substrate from the substrate accommodating part to retrieve a carbon nanotube produced on the synthetic substrate; a catalyst coating unit configured for coating a top surface of a synthetic substrate with a catalyst before the synthetic substrate is accommodated in the substrate accommodating part of the station part; and a second transporter for transporting the synthetic substrate between the retrieve part and the substrate accommodating part and between the catalyst coating unit and the substrate accommodating part. - View Dependent Claims (23, 24, 25, 26, 27, 28)
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29. A method for producing carbon nanotubes, comprising:
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coating a synthetic substrate with a catalyst; loading the substrate coated with the catalyst to a reaction chamber; supplying a source gas to the reaction chamber to synthesizing a carbon nanotube with the synthetic substrate; unloading the processed substrate from the reaction chamber; cooling the unloaded synthetic substrate below a predetermined temperature; and retrieving the carbon nanotube from the cooled synthetic substrate. - View Dependent Claims (30, 31, 32, 33, 34, 35, 36, 37, 38)
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Specification