PATTERN FORMING METHOD USING RELACS PROCESS
First Claim
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1. A pattern forming method comprising:
- forming a resist pattern on a to-be-processed film;
implanting ions in an upper surface of the resist pattern;
forming an organic film to cover the resist pattern after ion implantation;
heating the organic film to crosslink;
developing the organic film after heating;
forming a crosslinked resin film made of the organic film on a sidewall of the resist pattern;
removing the resist pattern after formation of the crosslinked resin film; and
processing the to-be-processed film using the crosslinked resin film as a mask.
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Abstract
A resist pattern is formed on a to-be-processed film. Ions are implanted in the upper surface of the resist pattern. After ion implantation, an organic film is formed to cover the resist pattern and heated. A crosslinked resin film made of the organic film which has crosslinked is formed on the sidewall of the resist pattern by developing the organic film after heating. After formation of the crosslinked resin film, the resist pattern is removed. The to-be-processed film is processed using the crosslinked resin film as a mask.
396 Citations
20 Claims
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1. A pattern forming method comprising:
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forming a resist pattern on a to-be-processed film; implanting ions in an upper surface of the resist pattern; forming an organic film to cover the resist pattern after ion implantation; heating the organic film to crosslink; developing the organic film after heating; forming a crosslinked resin film made of the organic film on a sidewall of the resist pattern; removing the resist pattern after formation of the crosslinked resin film; and processing the to-be-processed film using the crosslinked resin film as a mask. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A pattern forming method comprising:
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forming a resist pattern on a to-be-processed film; selectively implanting ions in a part of an upper surface of the resist pattern; forming an organic film to cover the resist pattern after ion implantation; heating the organic film to crosslink; developing the organic film after heating; forming a crosslinked resin film made of the organic film on a sidewall of a resist pattern in the area where ions were implanted and on a sidewall and an upper surface of a resist pattern in the area where ions were not implanted; removing the resist pattern in the area where ions were implanted after formation of the crosslinked resin film; and processing the to-be-processed film using the crosslinked resin film and the resist pattern in the area where ions were not implanted as a mask. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification