Pressure Transponder With Surface Accoustic Wave Sensor
First Claim
1. A pressure sensor having at least one membrane for protection of the pressure-sensitive element, which is accommodated in a measurement chamber that is filled with a pressure medium,wherein at least one surface acoustic wave sensor, which is wetted by the pressure medium, is arranged in each measurement chamber.
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Accused Products
Abstract
The invention relates to a pressure sensor, the measuring cell of which is provided with at least one membrane for the protection of the pressure-sensitive element and a measuring chamber, filled with pressure medium, in which the pressure-sensitive element is housed. According to the invention, the membrane is monitored for damage, whereby at least one surface wave sensor is arranged in the chamber filled with pressure medium. On damage to the membrane occurring, process medium is mixed with the pressure medium. A substance change in the sensitive region of the surface wave sensor is thus brought about which results in a differing signal run time. Any change in run time is an indictor of damage to the pressure sensor and may be signaled as such.
24 Citations
8 Claims
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1. A pressure sensor having at least one membrane for protection of the pressure-sensitive element, which is accommodated in a measurement chamber that is filled with a pressure medium,
wherein at least one surface acoustic wave sensor, which is wetted by the pressure medium, is arranged in each measurement chamber.
Specification