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METHOD OF GROWING CARBON NANOTUBES AND METHOD OF MANUFACTURING FIELD EMISSION DEVICE USING THE SAME

  • US 20080311818A1
  • Filed: 06/29/2006
  • Published: 12/18/2008
  • Est. Priority Date: 12/13/2005
  • Status: Active Grant
First Claim
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1. A method of growing carbon nanotubes, comprising:

  • preparing a substrate;

    forming a catalyst metal layer on the substrate to promote growing of carbon nanotubes;

    forming an amorphous carbon layer on the catalyst metal layer, the amorphous carbon layer partially covering the catalyst metal layer; and

    growing carbon nanotubes from a surface of the catalyst metal layer, the carbon nanotubes being grown on a portion of the surface of the catalyst metal layer that is not covered by the amorphous carbon layer.

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