System, method and apparatus for maintaining separation of liquids in a controlled meniscus

• US 20080314422A1
• Filed: 06/19/2007
• Published: 12/25/2008
• Est. Priority Date: 06/19/2007
• Status: Active Grant

• Current Assignee: Lam Research Corporation
• Original Assignee: Lam Research Corporation
• Inventors: Kholodenko, Arnold, O'Donnell, Robert, Lin, Cheng-Yu (Sean)
• Granted Patent: US 8,141,566 B2
• Time in Patent Office: Days
• US Class Current: 134/94.1
• CPC Class Codes: B08B 3/04 Cleaning involving contact with liquid
• CPC Class Codes: H01L 21/67034 for drying
• CPC Class Codes: H01L 21/67051 using mainly spraying means, e.g. nozzles

Abstract

A system and method of forming and using a proximity head. The proximity head includes a head surface, the head surface including a first zone, a second zone and an inner return zone. The first zone including a first flat surface region and a plurality of first discrete holes. Each one of the plurality of first discrete holes being connected to a corresponding one of a plurality of first conduits. The plurality of first discrete holes residing in the head surface and extending through the first flat surface region. At least a portion of the plurality of first discrete holes are arranged in a first row. The second zone including a second flat region and a plurality of second discrete holes. Each one of the plurality of second discrete holes being connected to a corresponding one of a plurality of second conduits. The plurality of second discrete holes residing in the head surface and extending through the second flat surface region. The inner return zone including a plurality of inner return discrete holes. The inner return zone being disposed between and adjacent to the first zone and the second zone. Each one of the plurality of the inner return discrete holes being connected to a corresponding one of a plurality of inner return conduits. The plurality of inner return discrete holes residing in the head surface and extending through the head surface. At least a portion of the plurality of inner return discrete, holes are arranged in an inner return row. The first row and the inner return row being substantially parallel. A first portion of an edge of each one of the plurality of inner return discrete holes is recessed into the head surface.

Claims

1. A proximity head comprising:

a head surface, the head surface including;

a first zone including a first flat surface region and a plurality of first discrete holes, each one of the plurality of first discrete holes being connected to a corresponding one of a plurality of first conduits, the plurality of first discrete holes residing in the head surface and extending through the first flat surface region, at least a portion of the plurality of first discrete holes are arranged in a first row;

a second zone including a second flat region and a plurality of second discrete holes, each one of the plurality of second discrete holes being connected to a corresponding one of a plurality of second conduits, the plurality of second discrete holes residing in the head surface and extending through the second flat surface region; and

an inner return zone including a plurality of inner return discrete holes, the inner return zone being disposed between and adjacent to the first zone and the second zone, each one of the plurality of the inner return discrete holes being connected to a corresponding one of a plurality of inner return conduits, the plurality of inner return discrete holes residing in the head surface and extending through the head surface, at least a portion of the plurality of inner return discrete holes are arranged in an inner return row, the first row and the inner return row being substantially parallel, wherein a first portion of an edge of each one of the plurality of inner return discrete holes is recessed into the head surface.

2. The proximity head of claim 1, wherein the first zone further includes:

a plurality of third discrete holes, each one of the plurality of third discrete holes being connected to a corresponding one of a plurality of third conduits, the plurality of third discrete holes residing in the head surface and extending through the first flat surface region, at least a portion of the plurality of third discrete holes are arranged in a third row, the third row being substantially parallel to the first row, the third row being disposed on a side of the first row opposing the interface row.

3. The proximity head of claim 2, wherein the plurality of first conduits are coupled to a first liquid source and configured to provide a first liquid to the head surface, the plurality of second conduits are coupled to a second liquid source and configured to provide a second liquid to the head surface, the plurality of inner return conduits and the plurality of third conduits being coupled to a vacuum source and configured to remove at least a portion of the first liquid from the head surface.

4. The proximity head of claim 1, wherein the recessed first portion of an edge of each one of the plurality of inner return discrete holes is recessed into the head surface at a first angle, the first angle forms a chamfer extending from the recessed first portion of an edge of each one of the plurality of inner return discrete holes toward the first row for a first distance.

5. The proximity head of claim 1, wherein the recessed first portion of an edge of each one of the plurality of inner return discrete holes is included in a recessed first angled portion having a first recessed edge at each one of the plurality of inner return discrete holes and the recessed first angled portion including a second recessed edge intersecting the head surface and wherein the recessed first angled portion extends from the inner return row toward the first row for a first distance.

6. The proximity head of claim 5, wherein the recessed first angled portion includes more than one angled portions.

7. The proximity head of claim 5, wherein the recessed first angled portion includes one or more curved portions.

8. The proximity head of claim 5, wherein the first recessed edge includes a curved portion from the recessed first angled portion into each one of the plurality of inner return discrete holes.

9. The proximity head of claim 1, wherein at least a portion of the plurality of second discrete holes are arranged in a second row, the second row and the inner return row being substantially parallel, the second row opposing the first row and wherein the second zone further includes:

a plurality of fifth discrete holes and plurality of sixth discrete holes, each one of the plurality of fifth discrete holes being connected to a corresponding one of a plurality of fifth conduits, each one of the plurality of sixth discrete holes being connected to a corresponding one of a plurality of sixth conduits, the plurality of fifth discrete holes and the plurality of sixth discrete holes residing in the head surface and extending through the second flat surface region, at least a portion of the plurality of fifth discrete holes are arranged in a third row, at least a portion of the plurality of sixth discrete holes are arranged in a fourth row the third row and at least a portion of the fourth row being substantially parallel to the second row, the third row being disposed on a side of the second row opposing the inner return row, the fourth row being disposed on a side of the fifth row opposing the second row.

10. The proximity head of claim 9, wherein the plurality of first conduits are coupled to a first liquid source and configured to provide a first liquid to the head surface, the plurality of second conduits are coupled to a second liquid source and configured to provide a second liquid to the head surface, the plurality of inner return conduits and the plurality of fifth conduits being configured to remove at least a portion of the second liquid from the head surface, the plurality of sixth conduits being configured to provide a first fluid to the head surface, the first fluid being different than the first liquid and the second liquid.

11. The proximity head of claim 1, wherein the second zone includes a protrusion having an angled surface, the angled surface having a first edge, the first edge intersecting the head surface between the second row and the inner return row, the angled surface having a second edge proximate to the inner return row, the second edge protruding from the head surface a protruding distance less than a distance between the head surface and a surface to be processed.

12. The proximity head of claim 11, wherein the angled surface intersects the head surface at an angle of between about 1 degree and about 89 degrees.

13. The proximity head of claim 11, wherein the angled surface includes more than one angled surface.

14. The proximity head of claim 13, wherein at least one of the more than one angled surface is substantially parallel to the head surface.

15. The proximity head of claim 1, wherein at least a portion of the plurality of second conduits intersect the head surface at an angle of between about 10 degrees and about 90 degrees and directed toward the inner return row.

16. The proximity head of claim 1, wherein at least a portion of at least one of the first flat surface region and the second flat surface region is curved.

17. A proximity head comprising:

a head surface, the head surface including;

a first zone including a first flat surface region and a plurality of first discrete holes, each one of the plurality of first discrete holes being connected to a corresponding one of a plurality of first conduits, the plurality of first discrete holes residing in the head surface and extending through the first flat surface region, at least a portion of the plurality of first discrete holes are arranged in a first row;

a second zone including a second flat region and a plurality of second discrete holes, each one of the plurality of second discrete holes being connected to a corresponding one of a plurality of second conduits, the plurality of second discrete holes residing in the head surface and extending through the second flat surface region; and

an inner return zone including a plurality of inner return discrete holes, the inner return zone being disposed between and adjacent to the first zone and the second zone, each one of the plurality of the inner return discrete holes being connected to a corresponding one of a plurality of inner return conduits, the plurality of inner return discrete holes residing in the head surface and extending through the head surface, at least a portion of the plurality of inner return discrete holes are arranged in an inner return row, the first row and the inner return row being substantially parallel, wherein the second zone includes a protrusion having an angled surface, the angled surface having a first edge, the first edge intersecting the head surface between the second row and the inner return row, the angled surface having a second edge proximate to the inner return row, the second edge protruding from the head surface a protruding distance less than a distance between the head surface and a surface to be processed.

18. A proximity head comprising:

a head surface, the head surface including;

a first zone including a first flat surface region and a plurality of first discrete holes, each one of the plurality of first discrete holes being connected to a corresponding one of a plurality of first conduits, the plurality of first discrete holes residing in the head surface and extending through the first flat surface region, at least a portion of the plurality of first discrete holes are arranged in a first row;

a second zone including a second flat region and a plurality of second discrete holes, each one of the plurality of second discrete holes being connected to a corresponding one of a plurality of second conduits, the plurality of second discrete holes residing in the head surface and extending through the second flat surface region; and

an inner return zone including a plurality of inner return discrete holes, the inner return zone being disposed between and adjacent to the first zone and the second zone, each one of the plurality of the inner return discrete holes being connected to a corresponding one of a plurality of inner return conduits, the plurality of inner return discrete holes residing in the head surface and extending through the head surface, at least a portion of the plurality of inner return discrete holes are arranged in an inner return row, the first row and the inner return row being substantially parallel, wherein at least a portion of the plurality of second conduits intersect the head surface at an angle of between about 10 degrees and about 90 degrees and directed toward the inner return row.

19. A proximity head comprising:

a head surface, the head surface including;

a first zone including a first flat surface region and a plurality of first discrete holes, each one of the plurality of first discrete holes being connected to a corresponding one of a plurality of first conduits, the plurality of first discrete holes residing in the head surface and extending through the first flat surface region, at least a portion of the plurality of first discrete holes are arranged in a first row;

a second zone including a second flat region and a plurality of second discrete holes, each one of the plurality of second discrete holes being connected to a corresponding one of a plurality of second conduits, the plurality of second discrete holes residing in the head surface and extending through the second flat surface region; and

an inner return zone including a plurality of inner return discrete holes, the inner return zone being disposed between and adjacent to the first zone and the second zone, each one of the plurality of the inner return discrete holes being connected to a corresponding one of a plurality of inner return conduits, the plurality of inner return discrete holes residing in the head surface and extending through the head surface, at least a portion of the plurality of inner return discrete holes are arranged in an inner return row, the first row and the inner return row being substantially parallel, wherein a first portion of an edge of each one of the plurality of inner return discrete holes is recessed into the head surface, wherein the second zone includes a protrusion having an angled surface, the angled surface having a first edge, the first edge intersecting the head surface between the second row and the inner return row, the angled surface having a second edge proximate to the inner return row, the second edge protruding from the head surface a protruding distance less than a distance between the head surface and a surface to be processed, wherein at least a portion of the plurality of second conduits intersect the head surface at an angle of between about 10 degrees and about 90 degrees and directed toward the inner return row.

20. A method of forming a meniscus comprising:

moving a proximity head in close proximity to a surface to be processed, wherein the proximity head includes a head surface, the head surface including;

a first zone including a first flat surface region and a plurality of first discrete holes, each one of the plurality of first discrete holes being connected to a corresponding one of a plurality of first conduits, the plurality of first discrete holes residing in the head surface and extending through the first flat surface region, at least a portion of the plurality of first discrete holes are arranged in a first row;

a second zone including a second flat region and a plurality of second discrete holes, each one of the plurality of second discrete holes being connected to a corresponding one of a plurality of second conduits, the plurality of second discrete holes residing in the head surface and extending through the second flat surface region; and

an inner return zone including a plurality of inner return discrete holes, the inner return zone being disposed between and adjacent to the first zone and the second zone, each one of the plurality of the inner return discrete holes being connected to a corresponding one of a plurality of inner return conduits, the plurality of inner return discrete holes residing in the head surface and extending through the head surface, at least a portion of the plurality of inner return discrete holes are arranged in an inner return row, the first row and the inner return row being substantially parallel;

forming a dual liquid meniscus between the head surface and the surface to be processed; and

removing a portion of the first liquid and the second liquid through the inner return including decreasing a velocity of the first liquid proximal to the inner return to a first velocity and wherein the first velocity is less than a second velocity of the second liquid proximal to the inner return.

21. The method of claim 20, wherein the second velocity is increased proximal to the inner return.

22. A method of forming a meniscus comprising:

moving a proximity head in close proximity to a surface to be processed, wherein the proximity head includes a head surface, the head surface including;

a first zone including a first flat surface region and a plurality of first discrete holes, each one of the plurality of first discrete holes being connected to a corresponding one of a plurality of first conduits, the plurality of first discrete holes residing in the head surface and extending through the first flat surface region, at least a portion of the plurality of first discrete holes are arranged in a first row;

a second zone including a second flat region and a plurality of second discrete holes, each one of the plurality of second discrete holes being connected to a corresponding one of a plurality of second conduits, the plurality of second discrete holes residing in the head surface and extending through the second flat surface region; and

an inner return zone including a plurality of inner return discrete holes, the inner return zone being disposed between and adjacent to the first zone and the second zone, each one of the plurality of the inner return discrete holes being connected to a corresponding one of a plurality of inner return conduits, the plurality of inner return discrete holes residing in the head surface and extending through the head surface, at least a portion of the plurality of inner return discrete holes are arranged in an inner return row, the first row and the inner return row being substantially parallel;

forming a dual liquid meniscus between the head surface and the surface to be processed; and

removing a portion of the first liquid and the second liquid through the inner return including increasing a velocity of the second liquid proximal to the inner return to a second velocity and wherein the second velocity is greater than a first velocity of the first liquid proximal to the inner return.