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Electron beam inspection method and electron beam inspection apparatus

  • US 20080315093A1
  • Filed: 05/02/2008
  • Published: 12/25/2008
  • Est. Priority Date: 06/19/2007
  • Status: Active Grant
First Claim
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1. An electron beam inspection apparatus including:

  • an electron optical system that irradiates an electron beam, which is emitted from an electron source, to a range covering a field of view on a sample;

    means for applying a voltage to the sample;

    electron beam imaging means for converging electrons, which are reflected from the sample due to the irradiated electron beam, so as to acquire a reflected-electron image;

    means that has the sample mounted thereon and moves the sample with respect to the irradiated electron beam;

    means that uses the reflected-electron beam to extract a foreign matter or defect on the sample, and records the position of the foreign matter or defect or an image thereof; and

    an ultraviolet irradiation system that irradiates ultraviolet rays to the sample, comprising;

    means for adjusting so that the shape of the irradiated area of the electron beam includes the shape of the irradiated area of the ultraviolet rays; and

    means for adjusting the intensity of the ultraviolet rays in the irradiated area of the electron beam while sustaining the reflected-electron imaging conditions for the reflected-electron image.

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