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TRACKING TYPE LASER INTERFEROMETER AND METHOD FOR RESETTING THE SAME

  • US 20080316497A1
  • Filed: 06/18/2008
  • Published: 12/25/2008
  • Est. Priority Date: 06/20/2007
  • Status: Active Grant
First Claim
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1. A tracking type laser interferometer that detects displacement of a retroreflector being an object to be measured by utilizing interference of a laser beam irradiated onto the retroreflector and reflected by the retroreflector in the returning direction, and carries out tracking by means of a two-axis turning mechanism using displacement in the position of the optical axis of the laser beam;

  • the same tracking type laser interferometer, comprising;

    a light irradiator that emits a fan-shaped laser light that is fan-shaped including the optical axis of the laser beam, is interlocked with turning movements of the two-axis turning mechanism around an axis orthogonal to the center axis of the corresponding fan shape; and

    a light receptor that has a specific positional relationship with the retroreflector or the light irradiator and receives the fan-shaped laser light.

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