OPTICAL SCAN DEVICE, OPTICAL SCAN TYPE MICROSCOPE, OBSERVATION METHOD, CONTROL DEVICE, AND CONTROL PROGRAM
First Claim
1. A light scanning apparatus comprising:
- at least three mirror scanners disposed at predetermined positions of a light path for light scanning; and
a light path switching unit switching said light path between a light path in which a highest-speed mirror scanner among said mirror scanners is valid and a light path in which said highest-speed mirror scanner is invalid, wherein said light path in which said highest-speed mirror scanner is valid and said light path in which said highest-speed mirror scanner is invalid form different light paths.
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Accused Products
Abstract
It is an object to realize smooth switching between free scanning and high speed scanning in a light scanning apparatus and a light scanning microscope. To attain the object, a light scanning apparatus includes at least three mirror scanners disposed at predetermined positions of a light path for light scanning, and a light path switching unit switching the light path between a light path in which a highest-speed mirror scanner among the mirror scanners is valid and a light path in which the highest-speed mirror scanner is invalid. Therefore, the switching between a free scanning mode and a high speed scanning mode is performed by the driving of the light switching unit and involves no movement of galvanometer scanners. In addition, since the resonant galvanometer scanner is invalid during the free scanning mode, it is possible to make the resonant galvanometer scanner on standby.
14 Citations
12 Claims
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1. A light scanning apparatus comprising:
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at least three mirror scanners disposed at predetermined positions of a light path for light scanning; and a light path switching unit switching said light path between a light path in which a highest-speed mirror scanner among said mirror scanners is valid and a light path in which said highest-speed mirror scanner is invalid, wherein said light path in which said highest-speed mirror scanner is valid and said light path in which said highest-speed mirror scanner is invalid form different light paths. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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Specification