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OPTICAL SCAN DEVICE, OPTICAL SCAN TYPE MICROSCOPE, OBSERVATION METHOD, CONTROL DEVICE, AND CONTROL PROGRAM

  • US 20080316561A1
  • Filed: 06/25/2008
  • Published: 12/25/2008
  • Est. Priority Date: 12/28/2005
  • Status: Active Grant
First Claim
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1. A light scanning apparatus comprising:

  • at least three mirror scanners disposed at predetermined positions of a light path for light scanning; and

    a light path switching unit switching said light path between a light path in which a highest-speed mirror scanner among said mirror scanners is valid and a light path in which said highest-speed mirror scanner is invalid, wherein said light path in which said highest-speed mirror scanner is valid and said light path in which said highest-speed mirror scanner is invalid form different light paths.

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