Segregating Wafer Carrier Types In Semiconductor Storage Devices

• US 20080317565A1
• Filed: 06/25/2007
• Published: 12/25/2008
• Est. Priority Date: 06/25/2007
• Status: Active Grant

• Current Assignee: Alsephina Innovations Inc. (Quarterhill Inc. (f/k/a Wi-LAN Inc.))
• Original Assignee: International Business Machines Corporation
• Inventors: Menser, Clayton D. JR., Courtois, Louise C.
• Granted Patent: US 8,337,133 B2
• Time in Patent Office: Days
• US Class Current: 414/222.02
• CPC Class Codes: H01L 21/67259 Position monitoring, e.g. misposition detection or presence detection
• CPC Class Codes: H01L 21/67294 using identification means, e.g. labels on substrates or labels on containers
• CPC Class Codes: H01L 21/67769 Storage means
• CPC Class Codes: H01L 21/67775 Docking arrangements

Abstract

A system for managing the entry of a wafer carrier into a stocker in a semiconductor manufacturing operation is disclosed. The system comprises a stocker that accepts wafer carriers via one or more input ports. The present invention provides a means for detecting the presence of a wafer carrier at the input port, means for identifying the type of the wafer carrier, and means for executing an action sequence if the stocker is not compatible with those wafer carriers. Upon detecting an erroneous condition, an action sequence is executed which may include prevention entry of the wafer carrier, and notifying an operator.

Claims

1-11. -11. (canceled)

12. A method for managing the entry of a wafer carrier into a stocker in a semiconductor manufacturing operation comprising the steps of:

identifying the type of the wafer carrier by scanning a barcode affixed to the wafer carrier;

wherein the step of identifying the type of wafer carrier comprises examining a plurality of identification pins on the underside of the wafer carrier, wherein said plurality of identification pins are configured and arranged to form a pattern corresponding to the type of wafer carrier;

associating the wafer carrier type with a customer;

storing the identity of the wafer carrier type in an RFID tag affixed to the wafer carrier;

executing an action sequence if the type of wafer carrier is not compatible with the stocker, the step of executing the action sequence comprises issuing an operator alert;

the step of executing the action sequence further comprising preventing the wafer carrier from entering the stocker;

the step of executing the action sequence further comprising rerouting the wafer carrier; and

the step of preventing the wafer carrier from entering the stocker comprises disabling the means for accepting a wafer carrier.

13-20. -20. (canceled)