Nanotube Device and Method of Fabrication
First Claim
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1. A method of depositing nanotubes, comprising:
- (a) defining a region on a structure by an aperture;
(b) configuring the aperture to control a number of nanotubes to be deposited by electrophoresis in the region; and
(c) depositing the number of nanotubes in the region by electrophoresis.
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Abstract
A nanotube device and a method of depositing nanotubes for device fabrication are disclosed. The method relates to electrophoretic deposition of nanotubes, and allows a control of the number of deposited nanotubes and positioning within a defined region.
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Citations
22 Claims
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1. A method of depositing nanotubes, comprising:
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(a) defining a region on a structure by an aperture; (b) configuring the aperture to control a number of nanotubes to be deposited by electrophoresis in the region; and (c) depositing the number of nanotubes in the region by electrophoresis. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A nanotube-based sensor, comprising:
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an insulating layer over a metal contact formed on a substrate; an aperture formed in the insulating layer, the aperture extending to the metal contact and defining a region at the metal contact; a nanotube disposed inside the aperture and having a first end contacting the region at substantially a center of the region, and a second end coupled to a molecule having a functional group for interacting with a sample. - View Dependent Claims (18, 19, 20)
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21. A method of forming a carbon nanotube-based device, comprising:
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providing a substrate with an insulating layer formed on a conductive layer; forming an aperture through the insulating layer to expose a region of the conductive layer; immersing the substrate in an electrolytic fluid containing carbon nanotubes; providing a metal electrode in the electrolytic fluid; applying a bias voltage across the conductive layer and the metal electrode; and depositing at least one carbon nanotube in a substantially perpendicular orientation with respect to the region, wherein one end of the carbon nanotube contacts the region proximate a center of the region. - View Dependent Claims (22)
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Specification