METHOD FOR FORMING PATTERN, METHOD FOR MANUFACTURING ELECTRO-OPTICAL DEVICE, AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE

• US 20080317943A1
• Filed: 05/06/2008
• Published: 12/25/2008
• Est. Priority Date: 06/20/2007
• Status: Abandoned Application

• Current Assignee: Seiko Epson Corporation (Seiko Group)
• Original Assignee: Seiko Epson Corporation (Seiko Group)
• Inventors: HIRAI, Toshimitsu
• Application Number:
  US12/115,582
• Publication Number:
  US 20080317943A1
• Time in Patent Office: Days
• US Class Current: 427/64
• CPC Class Codes: G02F 1/136286 Wiring, e.g. gate line, drain line
• CPC Class Codes: H05K 2201/09909 Special local insulating pattern, e.g. as dam around component
• CPC Class Codes: H05K 2203/013 Inkjet printing, e.g. for printing insulating material or resist
• CPC Class Codes: H05K 2203/1173 Differences in wettability, e.g. hydrophilic or hydrophobic areas
• CPC Class Codes: H05K 3/1208 Pretreatment of the circuit board, e.g. modifying wetting properties; Patterning by using affinity patterns providing shape patterns H05K3/1258; adhesion treatments H05K3/38
• CPC Class Codes: H05K 3/125 by ink-jet printing
• CPC Class Codes: H10K 71/15 characterised by the solvent used
• CPC Class Codes: H10K 71/611 using printing deposition, e.g. ink jet printing

Abstract

A method for forming a pattern includes: a) applying a droplet containing a lyophobic material to a substrate having a lyophilic part that is lyophillic with respect to a functional liquid so as to form a lyophobic part that is lyophobic with respect to the functional liquid and including a plurality of lyophobic parts; and b) applying the functional liquid to the lyophilic part positioned between the lyophobic parts. In the method, the lyophobic material includes at least one of a silane compound, a compound including a fluoroalkyl group, and a resin containing fluorine.

Claims

1. A method for forming a pattern, comprising:

a) applying a droplet containing a lyophobic material to a substrate having a lyophilic part, the lyophilic part being lyophillic with respect to a functional liquid, so as to form a lyophobic part, the lyophobic part being lyophobic with respect to the functional liquid and including a plurality of lyophobic parts; and

b) applying the functional liquid to the lyophilic part positioned between the lyophobic parts, wherein

the lyophobic material includes at least one of a silane compound, a compound including a fluoroalkyl group, and a resin containing fluorine.

2. The method for forming a pattern according to claim 1, wherein the lyophobic material is a resin containing fluorine in a side chain thereof.

3. The method for forming a pattern according to claim 1, wherein the silane compound is a self-assembled film.

4. The method for forming a pattern according to claim 1, wherein the lyophobic part is formed on a surface of the substrate with a self-assembled film that is made of a compound including the fluoroalkyl group.

5. The method for forming a pattern according to claim 1, wherein the lyophobic part is formed on the surface of the substrate with a self-assembled film including an alkyl group and hydrogen.

6. The method for forming a pattern according to claim 1, wherein the functional liquid is a liquid material obtained by dissolving a pattern forming material in a polar solvent.

7. The method for forming a pattern according to claim 1, wherein in the step b), a droplet of the functional liquid is applied to the lyophilic part.

8. The method for forming a pattern according to claim 1, wherein the functional liquid contains a conductive material.

9. The method for forming a pattern according to claim 8, wherein the conductive material contains at least one of gold, silver, copper, palladium, nickel, and indium tin oxide.

10. The method for forming a pattern according to claim 1, wherein the functional liquid contains a plating catalyst material.

11. A method for manufacturing an electro-optical device, comprising forming a pattern by the method for forming a pattern according to claim 1.

12. The method for manufacturing an electro-optical device according to claim 11, wherein the electro-optical device is an electromagnetic wave shield including a mesh part that is formed in a mesh shape with a conductive wire and a frame part that is formed around a periphery of the mesh part with the conductive wire, and the mesh part and the frame part are formed by the method for forming a pattern.

13. A method for manufacturing an electronic device, comprising forming a pattern by the method for forming a pattern according to claim 1.