×

INDICATION OF THE END-POINT REACTION BETWEEN XeF2 AND MOLYBDENUM

  • US 20080318344A1
  • Filed: 06/22/2007
  • Published: 12/25/2008
  • Est. Priority Date: 06/22/2007
  • Status: Active Grant
First Claim
Patent Images

1. A method for making a microelectromechanical systems (MEMS) device, comprising:

  • (a) providing a chamber and an unreleased MEMS device situated therein, the unreleased MEMS device comprising a sacrificial structure;

    (b) supplying an etchant to the chamber to thereby etch the sacrificial structure; and

    (c) monitoring a process parameter related to the pressure within the chamber as a function of time to thereby provide an indication of the extent of etching of the sacrificial structure.

View all claims
  • 3 Assignments
Timeline View
Assignment View
    ×
    ×