FEATURE EXTRACTION THAT SUPPORTS PROGRESSIVELY REFINED SEARCH AND CLASSIFICATION OF PATTERNS IN A SEMICONDUCTOR LAYOUT

• US 20080320421A1
• Filed: 06/20/2007
• Published: 12/25/2008
• Est. Priority Date: 06/20/2007
• Status: Abandoned Application

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Kanj, Rouwaida N., Monkowski, Michael D., Maynard, Daniel N., Demaris, David L.
• Application Number:
  US11/765,473
• Publication Number:
  US 20080320421A1
• Time in Patent Office: Days
• US Class Current: 716/136
• CPC Class Codes: G06F 30/398 Design verification or optimisation, e.g. using design rule check [DRC], layout versus schematics [LVS] or finite element methods [FEM] optical proximity correction [OPC] design processes G03F1/36

Abstract

A system, method and program product for searching and classifying patterns in a VLSI design layout. A method is provided that includes generating a target vector using a two dimensional (2D) low discrepancy sequence; identifying layout regions in a design layout; generating a feature vector for a layout region; comparing a subset of sequence values in the target vector with sequence values in the feature vector as an initial filter, wherein the system for comparing determines that the layout region does not contain a match if a comparison of the subset of sequence values in the target vector with sequence values in the feature vector falls below a threshold; and outputting search results.

Claims

1. A method of identifying patterns in a semiconductor layout, the method comprising:

specifying a target region by indicating polygonal regions on a mask layer;

generating a target vector using a two dimensional (2D) low discrepancy sequence;

identifying layout regions in a design layout;

generating a feature vector for a layout region;

comparing a subset of sequence derived feature values in the target vector with sequence derived feature values in a search region feature vector as an initial filter;

determining that the layout region does not contain a match if a comparison of the subset of sequence derived feature values in the target vector with corresponding values in the search region feature vector falls below a threshold; and

outputting search results.

2. The method of claim 1, further comprising computing additional sequence derived feature values to form a complete feature vector if the comparison of the subset of sequence derived feature values in the target vector with sequence derived feature values in the feature vector meets the threshold.

3. The method of claim 2, further comprising determining that the layout region forms a match if a comparison of the target vector with the complete feature vector meets a further threshold.

4. The method of claim 1, wherein the target vector and feature vector are determined by computing distances from points on a polygonal region to a sequence points generated from the 2D low discrepancy sequence.

5. A system for identifying patterns in a semiconductor layout, comprising:

a system for generating a target vector using a two dimensional (2D) low discrepancy sequence to select anchor points for measuring features in a design layout;

a system for identifying layout regions in the design layout;

a system for generating a feature vector for a layout region;

a system for comparing a subset of sequence derived feature values in the target vector with sequence derived values in a search region feature vector as an initial filter, wherein the system for comparing determines that the layout region does not contain a match if a comparison of the subset of sequence derived feature values in the target vector with sequence derived values in the feature vector falls below a threshold; and

a system for outputting search results.

6. The system of claim 5, wherein the system for generating the feature vector computes additional sequence values to form a complete feature vector if the comparison of the subset of feature derived sequence values in the target vector with feature derived sequence values in the feature vector meets the threshold.

7. The system of claim 6, wherein the system for comparing determines that the layout region forms a match if a comparison of the target vector with the complete feature vector meets a further threshold.

8. The system of claim 5, wherein the target vector and feature vector are determined by computing distances from points on a polygonal region to sequence points generated from the 2D low discrepancy sequence.

9. A computer program product stored on a computer readable medium for identifying patterns in a semiconductor layout, which when executed causes a computer system to perform functions comprising:

generating a target vector using a two dimensional (2D) low discrepancy sequence;

identifying layout regions in a design layout;

generating a feature vector for a layout region;

comparing a subset of sequence derived feature values in the target vector with sequence derived feature values in a search region vector as an initial filter, wherein the comparing determines that the layout region does not contain a match if a comparison of the subset of sequence derived feature values in the target vector with corresponding sequence derived feature values in the search region vector falls below a threshold; and

outputting search results.

10. The computer program product of claim 9, wherein generating the feature vector computes additional sequence values to form a complete feature vector if the comparing of the subset of feature derived sequence values in the target vector with feature derived sequence values in the feature vector meets the threshold.

11. The computer program product of claim 10, wherein the comparing determines that the layout region forms a match if a comparison of the target vector with the complete feature vector meets a further threshold.

12. The computer program product of claim 9, wherein the target vector and feature vector are determined by computing distances from points on a polygonal region to sequence points generated from the 2D low discrepancy sequence.