MEMS-BASED MONITORING

• US 20090000387A1
• Filed: 07/11/2008
• Published: 01/01/2009
• Est. Priority Date: 09/16/2005
• Status: Active Grant

• Current Assignee: Ryk E. Spoor, Zahid F. Mian
• Original Assignee: Ryk E. Spoor, Zahid F. Mian
• Inventors: Mian, Zahid F., Spoor, Ryk E.
• Granted Patent: US 7,832,281 B2
• Time in Patent Office: Days
• US Class Current: 73/763
• CPC Class Codes: G07C 3/00 Registering or indicating the condition or the working of machines or other apparatus, other than vehicles

Abstract

A solution for monitoring a property of an object and/or an area using a Micro-ElectroMechanical Systems (MEMS)-based monitoring device is provided. In an embodiment of the invention, the MEMS-based monitoring device includes a MEMS-based sensing device for obtaining data based on a property of the object and/or area and a power generation device that generates power from an ambient condition of the monitoring device. In this manner, the monitoring device can operate independent of any outside power sources or other devices. Further, the monitoring device can include a transmitter that transmits a signal based on the property. The monitoring device can be used to monitor a moving component of a machine, and can be integrated with a health monitoring system of the machine using one or more relay devices.

Claims

1. A monitoring system comprising:

a monitoring device including;

a Micro-ElectroMechanical Systems (MEMS)-based sensing device configured to sense a property of at least one of;

an area or an object to which the monitoring device is affixed;

a transmitter configured to transmit a signal based on the property, wherein at least one of;

a frequency, an amplitude, or a phase of the signal varies with the property, and wherein the signal is transmitted either continuously or periodically according to a set time period, and wherein at least one of;

the frequency, the amplitude, or the phase of the signal identifies the monitoring device; and

a power module configured to provide power to the sensing device and the transmitter.

2. The system of claim 1, wherein an impedance of the sensing device changes with the property.

3. The system of claim 1, wherein the property is at least one of:

a stress or a strain experienced by an object.

4. The system of claim 1, wherein the sensing device and transmitter are serially connected to the power module.

5. The system of claim 1, further comprising:

a receiver configured to receive the signal from the monitoring device;

a processor configured to process the signal to determine the sensed property; and

a health monitoring system configured to evaluate the sensed property.

6. The system of claim 1, wherein the power module includes a power generation device configured to generate power from an ambient condition of the monitoring device.

7. The system of claim 1, wherein the monitoring device is configured to monitor a property of a person.

8. The system of claim 1, wherein the monitoring device further includes a processing module configured to adjust the at least one of:

the frequency, the amplitude, or the phase of the signal to identify the monitoring device.

9. A system comprising:

a monitoring device including;

a Micro-ElectroMechanical Systems (MEMS)-based sensing device configured to sense a property of at least one of;

an area or an object;

a processor configured to receive the sensed property and generate property data based on the sensed property;

an acoustic transmitter configured to transmit the property data using an acoustic communication solution; and

a power module configured to supply power for the monitoring device.

10. The system of claim 9, further comprising a health monitoring system configured to receive the transmitted property data and evaluate the property data.

11. The system of claim 10, further comprising at least one additional monitoring device configured to monitor a second property of the at least one of:

the area or the object.

12. The system of claim 11, wherein the monitoring devices form a mesh network to assure communication with the health monitoring system.

13. The system of claim 9, wherein the monitoring device includes at least one additional MEMS-based sensing device configured to sense at least one additional property of the at least one of:

the area or the object, and wherein the processor is configured to receive the at least one additional sensed property and generate property data based on the at least one additional sensed property.

14. The system of claim 13, wherein each MEMS-based sensing device is physically connected to the processor using at least one of:

conductive paint or matched electrical contacts.

15. The system of claim 9, wherein the monitoring device further includes an energy emitter configured to produce a probe signal that is sensed by the MEMS-based sensing device.

16. A system comprising:

a monitoring device including;

a set of Micro-ElectroMechanical Systems (MEMS)-based sensing devices configured to sense a set of properties of an object;

a Complementary Metal-Oxide Semiconductor (CMOS)-based microprocessor configured to receive the sensed set of properties and generate property data based on the sensed set of properties;

a CMOS-based radio frequency transceiver configured to transmit the property data using a wireless communication solution; and

a power module configured to supply power for the monitoring device, the power module including;

a set of MEMS-based power storage devices; and

a MEMS-based power generating device configured to generate power from an ambient condition of the monitoring device.

17. The system of claim 16, further comprising a health monitoring system configured to receive the transmitted property data and evaluate the property data.

18. The system of claim 17, further comprising at least one additional monitoring device configured to monitor a second set of properties of the object.

19. The system of claim 18, wherein the monitoring devices form a mesh network to assure communication with the health monitoring system.

20. The system of claim 16, wherein the object comprises a component of a machine.

21. The system of claim 16, wherein each MEMS-based sensing device is physically connected to the microprocessor using at least one of:

conductive paint or matched electrical contacts.