SUBSTRATE HOLDER AND VACUUM FILM DEPOSITION APPARATUS
First Claim
1. A substrate holder comprising:
- a holding unit which holds a substrate;
a temperature measurement unit which is provided at a surface on a substrate side of said holding unit and is brought into contact with said substrate to measure a temperature of said substrate; and
a signal output unit which outputs temperature measurement signals from said temperature measurement unit.
1 Assignment
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Accused Products
Abstract
A substrate holder includes a holding unit which holds a substrate, a temperature measurement unit which is provided at a surface on a substrate side of the holding unit and is brought into contact with the substrate to measure a temperature of the substrate and a signal output unit which outputs temperature measurement signals from the temperature measurement unit. A vacuum film deposition apparatus has at least one vacuum film deposition unit including the substrate holder a vacuum chamber, a holder support portion provided within the vacuum chamber, connected to a connection portion of the substrate holder and supporting the substrate holder, a film deposition device forming a film by vacuum film deposition on the substrate held in the substrate holder and a signal receiving unit connected to the signal output unit and receiving the temperature measurement signals.
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Citations
10 Claims
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1. A substrate holder comprising:
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a holding unit which holds a substrate; a temperature measurement unit which is provided at a surface on a substrate side of said holding unit and is brought into contact with said substrate to measure a temperature of said substrate; and a signal output unit which outputs temperature measurement signals from said temperature measurement unit. - View Dependent Claims (2, 3, 4)
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5. A vacuum film deposition apparatus comprising at least one vacuum film deposition unit, said at least one vacuum film deposition unit comprising:
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a substrate holder including; a holding unit which holds a substrate; a temperature measurement unit which is provided at a surface on a substrate side of said holding unit and is brought into contact with said substrate to measure a temperature of said substrate; and a signal output unit which outputs temperature measurement signals from said temperature measurement unit; a vacuum chamber within which said substrate holder is provided; a holder support portion which is provided within said vacuum chamber, is connected to a connection portion of said substrate holder and supports said substrate holder; a film deposition device which forms a film by vacuum film deposition on said substrate held in said substrate holder supported by said holder support portion; and a signal receiving unit which is connected to said signal output unit and receives said temperature measurement signals. - View Dependent Claims (6, 7, 8, 9, 10)
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Specification