TANK-LOCKING DEVICE, SYSTEM FOR MANAGING LIQUID SUPPLY AND METHOD USING THE SAME

• US 20090000689A1
• Filed: 01/30/2008
• Published: 01/01/2009
• Est. Priority Date: 06/27/2007
• Status: Active Grant

• Current Assignee: Powerchip Semiconductor Manufacturing Corp. (Powerchip Technology Corporation)
• Original Assignee: Powerchip Semiconductor Corporation (Powerchip Technology Corporation)
• Inventors: Chen, Yen-Liang, Su, Yuh-Shyang, Hsieh, Sou-Yung
• Granted Patent: US 8,140,184 B2
• Time in Patent Office: Days
• US Class Current: 141/2
• CPC Class Codes: G01F 11/284 combined with electric level detecting means G01F11/282, G01F11/30 - G01F11/46 take precedence
• CPC Class Codes: Y10T 137/7043 Guards and shields
• CPC Class Codes: Y10T 137/7069 With lock or seal
• CPC Class Codes: Y10T 70/5031 Receptacle
• CPC Class Codes: Y10T 70/5562 Removable
• CPC Class Codes: Y10T 70/7051 Using a powered device [e.g., motor]

Abstract

A system for managing liquid supply suitable for a process equipment with a liquid tank is disclosed. The system includes a host, a data-reading tool, a system controller and a tank-locking device. The host stores a built-in liquid database. The data-reading tool used for reading data related to the liquid tank is electrically connected to the host. The host receives the data related to the liquid tank from the data-reading tool, and the received data mapped with the liquid database. The system controller drives the tank-locking device according to the signal from the host to whether or not allow replacement of the liquid tank.

Claims

1. A system for managing liquid supply, suitable for a process equipment using a liquid tank, comprising:

a host, comprising a liquid database;

a data-reading tool, electrically connected to the host, for reading a data related to the liquid tank;

a system controller, electrically connected to the host; and

a tank-locking device, connected to the system controller, disposed on the liquid tank and comprising a slideable locking detent, wherein the host receives the data related to the liquid tank sent by the data-reading tool and conducts a mapping between the data related to the liquid tank and the liquid database so that the system controller drives the tank-locking device according to a signal sent by the host, and wherein when the tank-locking device is in a locking state, the locking detent fastens the eye ring of the liquid tank, and when the tank-locking device is in an unlocking state, the locking detent releases the eye ring of the liquid tank.

2. The system for managing liquid supply according to claim 1, wherein the locking detent comprises a cavity portion.

3. The system for managing liquid supply according to claim 2, wherein when the tank-locking device is in the locking state, the cavity portion snaps the eye ring of the liquid tank.

4. The system for managing liquid supply according to claim 1, further comprising a liquid level sensor electrically connected to the host for detecting a level of a liquid in the liquid tank.

5. The system for managing liquid supply according to claim 1, wherein the data-reading tool comprises a barcode scanner.

6. The system for managing liquid supply according to claim 1, wherein the system controller comprises a liquid-supply device for pushing and moving the locking detent.

7. The system for managing liquid supply according to claim 6, wherein the liquid-supply device comprises an air pressure provider.

8. The system for managing liquid supply according to claim 7, wherein a driving pressure of the air pressure provider ranges between 1 kg/cm² and 7 kg/cm².

9. The system for managing liquid supply according to claim 7, wherein a maximum output pressure of the locking detent is 6.78 kg/cm².

10. The system for managing liquid supply according to claim 7, wherein a moving speed of the locking detent ranges between 50 mm/sec and 500 mm/sec.

11. The system for managing liquid supply according to claim 1, wherein the process equipment comprises a photoresist coating and developing machine.

12. The system for managing liquid supply according to claim 11, wherein the liquid tank comprises a photoresist tank.

13. A method for managing a liquid supply, suitable for a process equipment using a liquid tank comprising a tank-locking device in a locking state, comprising:

removing a fresh liquid tank and reading a data related to the fresh liquid tank when the liquid tank is required to be replaced;

mapping the data related to the fresh liquid tank with a data related to the liquid tank to verify whether the two data are in accordance with each other;

driving the tank-locking device to an unlocking state when the data related to the fresh liquid tank is in accordance with the data related to the liquid tank,; and

replacing the liquid tank with the fresh liquid tank.

14. The method according to claim 13, wherein the step of reading the data related to the fresh liquid tank comprises reading a barcode on the fresh liquid tank by using a barcode scanner.

15. The method according to claim 13, wherein when the data related to the fresh liquid tank is not in accordance with the data related to the liquid tank the tank-locking device, the tank-locking device is in the locking state.

16. The method according to claim 13, wherein the process equipment comprises a photoresist coating and developing machine.

17. The method according to claim 16, wherein the liquid tank comprises a photoresist tank.

18. The method according to claim 17, wherein the fresh liquid tank comprises a fresh photoresist tank.

19. A tank-locking device, suitable for a liquid tank having an eye ring, comprising:

a body;

a fastening portion, connected to a side of the body for fastening the tank-locking device onto the liquid tank;

a vessel body, embedded in the body, wherein a liquid inlet of the vessel body is protruded from the body;

a piston, disposed in the vessel body;

a driving rod, slideably disposed in the vessel body, wherein an end of the driving rod is connected to the piston; and

a locking detent, connected to another end of the driving rod and having a cavity portion;

wherein when the piston is exerted by a liquid pressure from the liquid inlet of the vessel body, the piston drives the driving rod to move the locking detent along a moving axis from a release position to a locking position so as to make the cavity portion snap the eye ring.

20. The tank-locking device according to claim 19, further comprising an elastic component disposed between the piston and the inner wall of the vessel body for exerting an elastic force on the piston against the bottom of the vessel body so that the driving rod moves the locking detent from the locking position to a release position.

21. The tank-locking device according to claim 20, wherein the elastic component comprises a spring coil pulled on the driving rod.

22. The tank-locking device according to claim 19, further comprising two guiding rails respectively disposed at both sides of the driving rod so as to make the locking detent lean on the guiding rails and substantially assure the locking detent to slide along the moving axis.

23. The tank-locking device according to claim 19, wherein the body comprises an accommodating groove.

24. The tank-locking device according to claim 23, wherein the locking detent is slideably disposed in the accommodating groove.

25. The tank-locking device according to claim 19, further comprising a liquid-supply device connected to the liquid inlet.

26. The tank-locking device according to claim 25, wherein the liquid-supply device comprises an air pressure supplier.