Structured silicon anode
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Accused Products
Abstract
A silicon/lithium battery can be fabricated from a silicon substrate. This allows the battery to be produced as an integrated unit on a chip. The battery includes a silicon anode formed from submicron diameter pillars of silicon fabricated on an n-type silicon wafer. The battery also includes a cathode including lithium.
21 Citations
24 Claims
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1-8. -8. (canceled)
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9. A method of fabricating an energy storage device comprising the steps of:
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forming an anode comprising an array of sub-micron silicon structures supported on a silicon substrate; forming a cathode comprising lithium; and arranging the anode and cathode in communication to form the energy storage device. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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- 20. A method of operating a battery, including a silicon anode comprising an array of sub-micron silicon pillars on a silicon substrate and a lithium cathode, the method comprising the step of forming a compound film on the silicon pillars during a charging step.
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23. A method of fabricating an electrode to form a battery with a lithium cathode and a lithium-based electrolyte comprising forming sub-micron silicon pillars on a silicon substrate.
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24. A method of forming an anode comprising the steps of:
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(a) depositing a thin film of cesium chloride onto a silicon based substrate; (b) exposing the film to water vapour so that the film reorganizes into a distribution of hemispherical islands on the surface; and (c) reactive ion etching the coated substrate, with the islands of cesium chloride acting as a resist so that the uncoated silicon is etched away leaving pillared structures on the surface of the substrate.
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Specification