Lighting Apparatus, Exposure Apparatus And Microdevice Manufacturing Method
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Accused Products
Abstract
An illumination apparatus for illuminating a surface (M) to be irradiated with illumination light emitted from a light source (2) comprises a reflection type fly-eye optical systems (12, 14) disposed between the light source (2) and the surface (M) to be irradiated and constituted by a plurality of reflection partial optical systems for wavefront-dividing a light beam from the light source (2) and superposing divided portions of the light beam onto each other on the surface (M) to be irradiated and a reflection type optical system (10) disposed between the light source (2) and the reflection type fly-eye optical systems (12, 14) for guiding the illumination light to the reflection type fly-eye optical systems (12, 14). The reflection type optical system (10) has a reflecting surface at least partly constructed by a diffusing surface.
26 Citations
28 Claims
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1-10. -10. (canceled)
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11. An illumination apparatus for illuminating a surface to be irradiated with illumination light emitted from a light source, the illumination apparatus comprising:
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a reflection type fly-eye optical system, between the light source and the surface to be irradiated, the fly-eye optical system having a plurality of reflection partial optical systems for wavefront-dividing a light beam from the light source and superposing divided portions of the light beam onto each other on the surface to be irradiated; and a reflection type optical system, between the light source and the reflection type fly-eye optical system, for guiding the illumination light to the reflection type fly-eye optical system; wherein the reflection type optical system has a reflecting surface at least partly constructed by a diffusing surface. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 27)
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23. An illumination method for illuminating a surface to be irradiated with illumination light emitted from a light source, the illumination method comprising:
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wavefront-dividing a light beam from the light source and superposing divided portions of the light beam onto each other on the surface to be irradiated by a reflection type fly-eye optical system, between the light source and the surface to be irradiated, the fly-eye optical system having a plurality of reflection partial optical systems; and guiding the illumination light to the reflection type fly-eye optical system by a reflection type optical system, between the light source and the reflection type fly-eye optical system; wherein the reflection type optical system has a reflecting surface at least partly constructed by a diffusing surface. - View Dependent Claims (25, 26, 28)
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24. (canceled)
Specification