PROJECTION DISPLAY SYSTEM INCLUDING A HIGH FILL RATIO SILICON SPATIAL LIGHT MODULATOR
First Claim
1. A display system comprising:
- a light source;
a first optical system optically coupled to the light source and adapted to provide an illumination beam along an illumination path;
a spatial light modulator positioned in the illumination path, the spatial light modulator comprising;
a CMOS substrate including a plurality of multi-level electrode devices;
a hinge structure coupled to the CMOS substrate, wherein the hinge structure comprises silicon material;
a mirror post coupled to the hinge structure and extending to a predetermined distance from the CMOS substrate; and
a mirror plate coupled to the mirror post and overlying the plurality of multi-level electrode devices; and
a second optical system optically coupled to the spatial light modulator and adapted to project an image onto a projection surface.
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Abstract
A display system includes a light source and a first optical system coupled to the light source and adapted to provide an illumination beam along an illumination path. The display system also includes a spatial light modulator positioned in the illumination path. The spatial light modulator includes a semiconductor substrate including a plurality of electrode devices and a hinge structure coupled to the semiconductor substrate. The hinge structure includes silicon material. The spatial light modulator also includes a mirror post coupled to the hinge structure and extending to a predetermined distance from the semiconductor substrate and a mirror plate coupled to the mirror post and overlying the plurality of electrode devices. The display system further includes a second optical system coupled to the spatial light modulator and adapted to project an image onto a projection surface.
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Citations
20 Claims
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1. A display system comprising:
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a light source; a first optical system optically coupled to the light source and adapted to provide an illumination beam along an illumination path; a spatial light modulator positioned in the illumination path, the spatial light modulator comprising; a CMOS substrate including a plurality of multi-level electrode devices; a hinge structure coupled to the CMOS substrate, wherein the hinge structure comprises silicon material; a mirror post coupled to the hinge structure and extending to a predetermined distance from the CMOS substrate; and a mirror plate coupled to the mirror post and overlying the plurality of multi-level electrode devices; and a second optical system optically coupled to the spatial light modulator and adapted to project an image onto a projection surface. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A projection display system comprising:
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a spatial light modulator including a plurality of micro-mirrors controllably deflectable between a first deflection angle and a second deflection angle, wherein each micro-mirror of the plurality of micro-mirror is associated with a pixel of an image and wherein each micro-mirror comprises; one or more multi-level electrodes provided on a support substrate; a hinge device coupled to the support substrate, wherein the hinge device comprises silicon material; a mirror post coupled to the hinge device and extending away from the support substrate; and a mirror plate coupled to the mirror post and overlying the one or more multi-level electrodes; projection optics provided in a projection path lying along the first deflection angle and adapted to project the image on a projection surface; optics provided in a light dump path lying along the second deflection angle and adapted to reduce an intensity of light propagating along the light dump path; a plurality of light emitting diodes configured to produce a sequential train of optical pulses in an illumination beam, each one of the plurality of light emitting diodes producing an optical pulse of a different wavelength; and illumination optics optically coupled to the plurality of light emitting diodes and adapted to direct the illumination beam to the spatial light modulator. - View Dependent Claims (9, 10, 11, 12, 13, 14)
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15. A projection display system comprising:
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a spatial light modulator including a plurality of micro-mirrors controllably deflectable between a first deflection angle and a second deflection angle, wherein each micro-mirror of the plurality of micro-mirror is associated with a pixel of an image and wherein each micro-mirror comprises; one or more electrodes provided on a CMOS substrate; a hinge device coupled to the CMOS substrate, wherein the hinge device comprises silicon material; a mirror post coupled to the hinge device and extending away from the CMOS substrate; and a mirror plate coupled to the mirror post and overlying the one or more electrodes; optics provided in a projection path lying along the first deflection angle and adapted to project the image on a projection surface; optics provided in a light dump path lying along the second deflection angle and adapted to reduce an intensity of light propagating along the light dump path; a video display controller coupled to an input port and operative to receive input video signals, the video display controller configured to produce electrical signals according to a pulse width modulation scheme and corresponding to the input video signals; one or more lasers operative as a light source and configured to produce a sequential train of optical pulses in an illumination beam, the one or more lasers in electrical communication with the video display controller and configured to produce an optical pulse of a different wavelength according to the electrical signals; and illumination optics optically coupled to the one or more lasers and adapted to direct the illumination beam to the spatial light modulator. - View Dependent Claims (16, 17, 18, 19, 20)
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Specification